Digital PCR (polymerase chain reaction) chip and preparation method thereof
A chip and digital technology, applied in the field of nucleic acid detection, can solve the problems of long signal reading time, unavoidable pollution and demulsification, and low uniformity of droplets, so as to reduce the possibility of contamination and demulsification, and speed up Droplet generation speed and droplet disintegration ability, the effect of increasing droplet generation speed
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[0042] The preparation of above-mentioned digital PCR chip, specific steps are as follows:
[0043] S1: Preparation of silicon wafer mold with microstructure:
[0044] According to the structure of the designed droplet generation module, use AutoCAD software to draw the required graphics and make a film mask; use a four-inch single-crystal silicon wafer as the substrate, through photolithography and deep reactive ion etching, etch out The male molds of the microfluidic channels 111 and 121 with a height of 30 μm were used to obtain silicon wafer molds with microstructures.
[0045] S2: Preparation of PDMS cover slip on silicon wafer mold 1:
[0046] (1) Deposit a layer of organic matter on the surface of the silicon wafer: place the silicon wafer mold and an open centrifuge tube containing 5 μL to 20 μL of fluorosilane in a vacuum drying oven, and evacuate to a negative pressure in the range of 0.8psi to 1psi to make the fluorosilane Vaporization, the mold is left in fluoros...
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