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Development liquid for TFT-LCD (thin film transistor-liquid crystal display) displaying

A developing solution and technology for display, applied in the field of TFT-LCD, can solve the problems of inability to meet demand, difficult to form fine images, etc., and achieve the effects of good development, avoidance of residues, and good development performance.

Inactive Publication Date: 2017-09-01
HEFEI HUIKE PRECISION DIE CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Yet according to the technology of known developing solution, although the photosensitive resist can be used for dissolving and removing the unexposed and unnecessary part of the coated film with an alkaline developing solution after coating, pre-baking and exposure, it is easy to produce undesired parts during development. Particles or undissolved substances remain in the developing part, so it is difficult to form a fine image after developing, which cannot meet the market demand

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] Example 1 A developing solution for TFT-LCD display, said developing solution is composed of the following components in parts by weight: 22 parts of basic compound, 7 parts of nonionic surfactant, 9 parts of penetrating agent and 42 parts of deionized water share.

[0018] The basic compound is an inorganic basic compound or an organic basic compound; wherein, the inorganic basic compound is: one or more of alkali metal hydroxides, bicarbonates, and carbonates; organic basic compounds For: monomethylamine, dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine, monoethanolamine, diethanolamine, triethanolamine, tetramethylammonium hydroxide, hydroxide One or more of tetraethylammonium and monoethanoldimethylamine.

[0019] The nonionic surfactant is at least one selected from coconut oil fatty acid monoethanolamide, coconut oil fatty acid diethanolamide, castor oil polyoxyethylene ether and castor oil polyoxyethylene ether.

[0020] The penetratin...

Embodiment 2

[0023] Example 2 A developing solution for TFT-LCD display, said developing solution is composed of the following components in parts by weight: 26 parts of basic compound, 14 parts of nonionic surfactant, 15 parts of penetrating agent and 54 parts of deionized water share.

[0024] The basic compound is an inorganic basic compound or an organic basic compound; wherein, the inorganic basic compound is: one or more of alkali metal hydroxides, bicarbonates, and carbonates; organic basic compounds For: monomethylamine, dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine, monoethanolamine, diethanolamine, triethanolamine, tetramethylammonium hydroxide, hydroxide One or more of tetraethylammonium and monoethanoldimethylamine.

[0025] The nonionic surfactant is at least one selected from coconut oil fatty acid monoethanolamide, coconut oil fatty acid diethanolamide, castor oil polyoxyethylene ether and castor oil polyoxyethylene ether.

[0026] The penetrat...

Embodiment 3

[0029] Example 3 A developing solution for TFT-LCD display, said developing solution is composed of the following components in parts by weight: 24 parts of basic compound, 11 parts of nonionic surfactant, 12 parts of penetrating agent and 48 parts of deionized water share.

[0030] The basic compound is an inorganic basic compound or an organic basic compound; wherein, the inorganic basic compound is: one or more of alkali metal hydroxides, bicarbonates, and carbonates; organic basic compounds For: monomethylamine, dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine, monoethanolamine, diethanolamine, triethanolamine, tetramethylammonium hydroxide, hydroxide One or more of tetraethylammonium and monoethanoldimethylamine.

[0031] The nonionic surfactant is at least one selected from coconut oil fatty acid monoethanolamide, coconut oil fatty acid diethanolamide, castor oil polyoxyethylene ether and castor oil polyoxyethylene ether.

[0032] The penetrat...

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PUM

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Abstract

The invention discloses a development liquid for TFT-LCD (thin film transistor-liquid crystal display) displaying. The developing liquid is prepared from the following components in parts by weight: 22 to 26 parts of alkaline compound, 7 to 14 parts of nonionic surfactant, 9 to 15 parts of penetrant, and 42 to 54 parts of deionized water. The developing liquid has the characteristics and advantages that the defects of failure to simultaneously realize developing property, defoaming property and dispersion stability and narrow operation temperature range in the use process of the existing developing liquid are overcome; the adding of a defoaming agent is not needed, the developing property is good, the residue content is low, the operation temperature range is wide, the pollution to environment is small, and the like; in the developing preparation technology of light-sensing resin, the important and wide application is realized; the developing property is good, the generation of residues is avoided, the toxicity is low, the flammability is avoided, the management is easy, the treatment of waste liquid is simple and convenient, the cost is low, and the like.

Description

technical field [0001] The invention relates to the technical field of TFT-LCD, in particular to a developing solution for TFT-LCD display. Background technique [0002] Generally, in the preparation processes of liquid crystal displays, printed circuit boards, and integrated circuits, in order to obtain fine patterns, radiation-sensitive compositions such as photoresists are commonly used to form thin films on substrates by coating. Develop and remove unnecessary coating film parts to obtain good graphics. [0003] In these lithography processes, a mask with a circuit pattern is transferred to a photoresist on a wafer by exposure, and then the exposed side of the photoresist is brought into contact with a developer. For positive, the exposed part is dissolved in developer, and for negative tone, the unexposed areas dissolve in the developer. [0004] The first objective of the development process is that the unexposed positive resist film should be minimally attacked by t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/32
CPCG03F7/322
Inventor 白航空
Owner HEFEI HUIKE PRECISION DIE CO LTD
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