High-performance straight-waveguide-type electro-optic phase modulator and preparation method thereof
An electro-optic phase modulation, straight waveguide technology, applied in nonlinear optics, instruments, optics, etc., can solve the problems of inability to meet the high requirements of electro-optic modulation speed and capacity, low electro-optic coefficient, and high half-wave voltage, and achieve excellent phase modulation capability. , Improve device performance, the effect of low half-wave voltage
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[0042] A method for preparing a high-performance direct waveguide type electro-optic phase modulator, comprising the following steps:
[0043] 1. Crystal processing
[0044] 1.1. Select a crack-free and well-crystallized area for the tetragonal phase of the [001] crystal orientation, the orthorhombic phase of the [110] crystal orientation, or the trigonal phase PMNT system or PIMNT system of the [111] crystal orientation. Three-dimensional orientation, and cut into the shape required for the experiment (4~10)*(4~10)*(2~4) mm (a*b*c), grind plane 1, plane 2 and their parallel planes and polishing, such as figure 1 shown. Grind lightly with sandpaper until there is no obvious scratch, and then polish it on a polishing machine until it is close to an optical plane (flatness is less than 1 micron) to obtain the sample required for the experiment.
[0045] 2. Annealing
[0046] 2.1. Annealing the tetragonal phase of the [001] crystal orientation, the orthorhombic phase of the [...
Embodiment 1
[0065] 1. Crystal processing
[0066] 1.1. Select a crack-free and well-crystallized region of the relaxor ferroelectric single crystal of the tetragonal phase PMNT system with [001] crystal orientation, and three-dimensionally orientate it, and cut it into the shape required for the experiment 4*10*2 mm (a*b* c), grinding and polishing plane 1, plane 2 and their parallel planes, such as figure 1 shown. Grind lightly with sandpaper until there are no obvious scratches, and then polish it on a polishing machine until it is close to an optical plane (flatness is less than 1 micron) to obtain the sample required for the experiment.
[0067] 2. Annealing
[0068] 2.1. Annealing the relaxation ferroelectric single crystal sample of tetragonal phase PMNT system with the [001] crystal orientation described in step 1 to eliminate the stress generated during growth, cutting, polishing and ferroelectric phase formation. The crystal was placed in an atmosphere furnace, and the tempera...
Embodiment 2
[0085] 1. Crystal processing
[0086] 1.1. Select a crack-free and well-crystallized region of the [110] orthorhombic PIMNT system relaxor ferroelectric single crystal, and cut it into the shape required for the experiment 10*4*3 mm (a*b *c), grind and polish plane 1, plane 2 and their parallel planes, such as figure 1 shown. Grind lightly with sandpaper until there are no obvious scratches, and then polish it on a polishing machine until it is close to an optical plane (flatness is less than 1 micron) to obtain the sample required for the experiment.
[0087] 2. Annealing
[0088] 2.1. Perform annealing treatment on the [110] oriented orthorhombic PIMNT system relaxation ferroelectric single crystal sample described in step 1 to eliminate the stress generated during growth, cutting, polishing and ferroelectric phase formation. The crystal was placed in an atmosphere furnace, and the temperature was raised to 500° C. at a rate of 4° C. / minute per minute, and kept for 15 hou...
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