Conformal Coating System for Microscopic Surface of Materials

Abstract

The invention discloses a material microscopic surface cotype film-coating system, and relates to the technical field of surface cotype film coating. The material microscopic surface cotype film-coating system comprises a chemical vapor deposition reaction cavity, an air inlet supply system, a vacuum control system, an electric heating alloy wire heating system, a circulating water cooling system and a quartz observation window, wherein the air inlet supply system communicates with the side face of the reaction cavity, the vacuum control system is located on the side face of the reaction cavity, the electric heating alloy wire heating system is located on the upper portion of the reaction cavity, the circulating water cooling system is located on the lower portion of the reaction cavity, and the quartz observation window is located on the upper portion of the reaction cavity. The material microscopic surface cotype film-coating system has the beneficial effects that a formed coating film layer is of the nanoscale and has the same type with raw materials, compactness and evenness are achieved, and the thickness is controllable; the air inlet rate is adjusted by controlling the water-bath heating temperature and heating of a resistance wire which is wound outside an air inlet pipeline and adopting a mode of a gas flowmeter, a mass flow controller is omitted, the equipment cost is reduced, configuration of the material microscopic surface cotype film-coating system is simplified, and the possibility of condensation of a reactive monomer in the air inlet pipeline is greatly reduced.

Description

technical field [0001] The invention belongs to the technical field of conformal coating on surfaces, and in particular relates to a nanoscale conformal coating and surface hydrophobic modification treatment system for the microscopic surface of materials. Background technique [0002] Hydrophobicity is one of the important characteristics of the material surface, which is determined by the chemical composition of the material and the surface geometry. Its properties are usually evaluated by water contact angle. In general, a surface whose contact angle of water on a solid surface exceeds 90° is called a hydrophobic surface. When the contact angle of water on a solid surface exceeds 150°, the surface is called a superhydrophobic surface. [0003] With the development of society, the requirements for the hydrophobicity of materials in industry and life are getting higher and higher. For many applications such as waterproof clothing, packaging materials, waterproof electron...

AI Technical Summary

Problems solved by technology

However, the plasma generation process will be accompanied by high energy, which will have a greater destructive effect on the fluorine-containing groups required for surface hydrophobic modification. The chemical structure of the film cannot be precisely controlled and the required functional groups are not easy to preserve; The temperature resistance requirements of the permanent material are also higher

In addition, the energy required for the PECVD reaction is high, which is not conducive to the control of surface hydrophobic modification conditions and modification costs

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