Preparation method for nanometer silicon powder

A technology of nano-silicon powder and nano-silicon, which is applied in the field of material chemistry, can solve problems such as uneven particle distribution, long time consumption, and great impact on product quality, and achieve the effects of ensuring product quality, reducing production costs, and regular crystal lattices

Inactive Publication Date: 2018-06-01
HEFEI KAIER NANOMETER ENERGY & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the mechanical ball milling method is relatively simple and low in cost, but has disadvantages such as low product purity, many crystal defects, long time consumption, and uneven particle distribution.
The raw material price of the plasma evaporation and condensation method is low and no post-treatment is required, but the quality of the product is greatly affected by the quality of the raw material, and it is difficult to guarantee the yield and product purity
The reaction mechanism of the chemical vapor deposition method is not clear enough, the safety of the reaction needs to be solved, and the shape of the obtained products is mostly amorphous

Method used

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  • Preparation method for nanometer silicon powder
  • Preparation method for nanometer silicon powder
  • Preparation method for nanometer silicon powder

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] Embodiment 1: the preparation of nano silicon powder

[0020] (1) Vacuumize the entire preparation system, and add nitrogen at the same time for flushing and protection until the entire preparation system is a nitrogen environment;

[0021] (2) Start the plasma generator 10, adjust to the working gas pressure is 0.3MPa, the working voltage is 300V, the working current is 300A, and the working flow is 70m 3 / h;

[0022] (3) Use silane with a purity of 99.99% as a raw material, start the flowmeter 60, and make the raw material pass through the plasma arc and enter the plasma generator 10 at a feed rate of 5 kg / h. Under the action of the plasma, silane is rapidly ionized and decomposed to form Silicon ions and hydrogen ions, and silicon ions recombine to nucleate to form nano-silicon particles;

[0023] (4) Driven by the nitrogen flow, the nano-silicon particles enter the separator for gas-solid separation, and the separated gas is emptied or recycled after passing throu...

Embodiment 2

[0029] Embodiment 2: the preparation of nano silicon powder

[0030] Prepare according to the preparation method of Example 1, the difference is that the working gas pressure of the plasma generator 10 in the step (2) is 0.4MPa, the working voltage is 300V, the working current is 350A, and the working flow is 75m 3 / h; the feed rate of the raw material silane in the step (3) is 7kg / h; the time for the plasma generator 10 to continue running in the step (5) is 70 minutes.

[0031] The nano-silicon powder obtained in the present embodiment is a brownish-yellow powder, and through X-ray diffraction analysis, the XDR figure is as follows Figure 4 As shown, its test values ​​are shown in Table 2:

[0032] Table 2:

[0033] 2-Theta

[0034] Scanning electron microscopy, such as Figure 5 As shown, the average particle size is 84nm, and the specific surface area is 78.1m 2 / g.

Embodiment 3

[0035] Embodiment 3: the preparation of nano silicon powder

[0036] Prepare according to the preparation method of Example 1, the difference is that the working gas pressure of the plasma generator 10 in the step (2) is 0.5MPa, the working voltage is 350V, the working current is 350A, and the working flow is 80m 3 / h; the feed rate of the raw material silane in the step (3) is 10kg / h; the time for the plasma generator 10 to continue running in the step (5) is 90 minutes.

[0037] The nano-silicon powder obtained in the present embodiment is a brownish-yellow powder, and through X-ray diffraction analysis, the XDR figure is as follows Image 6 As shown, its test values ​​are shown in Table 3:

[0038] table 3:

[0039] 2-Theta

[0040] Scanning electron microscopy, such as Figure 7 As shown, the average particle size is 93nm, and the specific surface area is 65.7m 2 / g.

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Abstract

The invention specifically relates to a preparation method for nanometer silicon powder, belonging to the technical field of material chemistry. The preparation method comprises the following steps: (1) introducing silane into a plasma generator and carrying out ionization decomposition and re-nucleation so as to obtain nanometer silicon particles; and (2) subjecting the nanometer silicon particles to gas-solid separation and cooling so as to obtain the nanometer silicon powder, wherein the above steps are carried out in a nitrogen environment. The preparation method provided by the inventionis simple in process, good in product quality and low in production cost.

Description

technical field [0001] The invention belongs to the technical field of material chemistry, and in particular relates to a preparation method of nano silicon powder. Background technique [0002] Nano-silica powder is a semiconductor material widely used in the fields of microelectronics, electrode materials and solar cells. It has the advantages of large surface area, high surface activity and low bulk density. At present, the common methods used to prepare nano-silicon powder include mechanical ball milling, plasma evaporation and condensation, and chemical vapor deposition. Among them, the mechanical ball milling method is relatively simple and low in cost, but has disadvantages such as low product purity, many crystal defects, long time consumption, and uneven particle distribution. The raw material price of the plasma evaporation and condensation method is low, and no post-treatment is required, but the quality of the product is greatly affected by the quality of the ra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/029B82Y40/00
CPCB82Y40/00C01B33/029
Inventor 张芬红
Owner HEFEI KAIER NANOMETER ENERGY & TECH
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