Preparation method of anti-abrasion diamond-like carbon coating layer

A technology of diamond coating and diamond-like film, which is applied in the direction of metal material coating process, coating, ion implantation plating, etc., to achieve large-scale production, increase deposition rate, and take into account the effect of resistivity

Active Publication Date: 2018-08-03
BEIJING NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The present invention aims to solve the problems described above

Method used

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  • Preparation method of anti-abrasion diamond-like carbon coating layer
  • Preparation method of anti-abrasion diamond-like carbon coating layer
  • Preparation method of anti-abrasion diamond-like carbon coating layer

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preparation example Construction

[0052] The preparation method of the coating of the present application comprises the following steps: spraying wet, degreasing and degreasing treatment on the surface of the substrate;

[0053] The surface of the substrate is alternately cleaned with high and low energy by using the ion source of the anode layer, the energy of the ion source of the anode layer is 1-3000eV, and the beam current intensity is 1-500mA; the surface of the substrate with a roughness less than 0.01 micron is obtained.

[0054] With the carbon target as the cathode, the generated carbon ions pass through the first oscillating wire package, the drain wire package and the magnetic filter elbow in sequence. The magnetic filtering elbow is a T-shaped tube, and the second pulse line package, the bending line package and the defocusing line package are arranged in sequence. Deposition of the ta~C coating is then carried out on the substrate.

[0055] Deposition process: arcing current is 50-100A, gas volu...

Embodiment 1

[0061] S1: Use the anode layer ion source to clean the substrate with high energy (1500-2000V), and use the anode layer ion source to clean the substrate with low energy (100-500V);

[0062] S2: The carbon target is used as the cathode, the arcing current is 100A; the high-power pulse bias voltage is 10kV, the pulse width is 1.2ms, and the pulse frequency is 50HZ; the DC bias voltage is 300V, and the duty cycle is 80%. The deposition time is 15 minutes, and the voltage of the positive pressure plate is 30-80V.

[0063] The magnetic field parameters of each wire package are as follows: 201: current 3KA, frequency 18HZ; 203: current 5A, frequency 50Hz; 204: current 20A, frequency 80HZ; 205: 3A; 207: 10A, frequency 150HZ.

[0064] S3: an array with an etching interval of 30 microns and a line width of 200 microns.

[0065] S4: Cleaning the diamond-like carbon coating with high energy (2000-2500V) using the ion source of the anode layer.

Embodiment 2

[0067] S1: Use the anode layer ion source to clean the substrate with high energy (2000-2500V), and use the anode layer ion source to clean the substrate with high energy (100-300V);

[0068] S2: The carbon target is used as the cathode, the arcing current is 100A; the high-power pulse bias voltage is 20kV, the pulse width is 1.2ms, and the pulse frequency is 100HZ; the DC bias voltage is 300V, and the duty cycle is 30%. The deposition time is 15 minutes, and the voltage of the positive pressure plate is 30-80V.

[0069] S3: an array with an etching interval of 30 microns and a line width of 200 microns.

[0070] S4: Cleaning the diamond-like carbon coating with high energy (2000-2500V) using the ion source of the anode layer.

[0071] The magnetic field parameters of each wire package are as follows: 201: current 3KA, frequency 50HZ; 203: current 5A, frequency 50Hz; 204: current 20A, frequency 80HZ; 205: 3A; 207: 10A, frequency 200HZ.

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Abstract

The invention discloses a preparation method of an anti-abrasion diamond-like carbon coating layer. The preparation method comprises the following steps that S1, the surface of a substrate is subjected to high and low energy alternate cleaning through a gas ion source; S2, a diamond-like carbon coating layer is deposited on the substrate is through a magnetic filtering deposition technique with acarbon target as a cathode, wherein the method is high in deposition rate, low in cost and capable of achieving mass production; S3, the diamond-like carbon coating layer is subjected to surface etching through a laser device, and the etching interval is 2-10 [mu]m; and S4, a graphical diamond-like carbon film is subjected to surface treatment through the gas ion source. The coating layer preparedthrough the method is of a structure that the high-sp3 content and low-sp3 content of tetrahedron armorphous carbon are alternately changed; and the coating layer has the anti-abrasion performance and is higher in crack growing preventing capacity and friction and abrasion preventing performance compared with hydrogen containing diamond-like carbon, diamond-like carbon high in sp3 content and diamond-like carbon low in sp3 content.

Description

technical field [0001] The invention belongs to the field of film deposition, and in particular relates to a preparation method of a diamond-like coating. Background technique [0002] Diamond-Like-Carbon (hereinafter referred to as DLC) coating such as tetrahedral diamond-like carbon (ta-diamond-like carbon, referred to as ta-DLC) film is an amorphous material composed of carbon as the basic element. Diamond-like carbon film (DLC), which belongs to amorphous carbon with amorphous metastable structure in structure, is composed of sp 3 hybridization and sp 2 Hybrid carbon composition. sp in film 3 The structure determines that the diamond-like carbon film has many excellent properties similar to diamond, and the sp 2 The structure determines that the diamond-like carbon film has many characteristics of graphite. Internationally, the insulating hard amorphous carbon film with a hardness exceeding 20% ​​of the diamond hardness is called a diamond-like carbon film. In terms...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/06C23C14/58C23C14/02
CPCC23C14/022C23C14/0611C23C14/325C23C14/5826C23C14/5873
Inventor 廖斌欧阳晓平张旭吴先映左帅韩然刘建武杨晓峰罗军庞盼
Owner BEIJING NORMAL UNIVERSITY
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