Production technology of miniature component made of silicon carbide ceramic

Abstract

The invention discloses a production technology of a miniature component made of silicon carbide ceramic. The production technology comprises the following steps: a, producing powder: using Si powderas a raw material, preparing a grinding medium, and performing wet ball milling to pulverize the Si powder so as to refine the Si powder till the diameter of 2-8 microns, wherein during ball milling,silicon carbide balls and a silicon carbide-lined tank are used; b, mixing silicon powder and coke, using silicon dioxide and petroleum coke, adding table salt and wood dust, placing in an electric furnace, continuously heating, and then taking out a material; c, designing silicon carbide powder in the step b into a presintered body, then machining into a thin sheet, and micromachining the thin sheet by using a precision grinding machine or a micro electrical discharge machining machine; d, placing a machined workpiece in a graphite or silicon carbide crucible; e, machining the carbonized workpiece, and finally grinding and polishing. Modern advanced machining technologies such as laser and ultrasonic are combined into product machining, so that the production efficiency and the quality ofa product are improved.

Description

technical field [0001] The invention relates to the technical field of ceramic processing, in particular to a production process of micro-components of silicon carbide ceramics. Background technique [0002] SiC ceramics not only have excellent mechanical properties at room temperature, such as high bending strength, excellent oxidation resistance, good corrosion resistance, high wear resistance and low friction coefficient, but also high temperature mechanical properties (strength, creep resistance etc.) are the best known ceramic materials. The high temperature strength of hot pressing sintering, pressureless sintering and hot isostatic pressing sintering can be maintained up to 1600°C, which is the best high temperature strength among ceramic materials. Oxidation resistance is also the best among all non-oxide ceramics. Also known as corundum, SiC ceramics have been widely used in industrial fields such as petroleum, chemical industry, microelectronics, automobile, aero...

AI Technical Summary

Problems solved by technology

[0003] The disadvantage of SiC ceramics is that the fracture toughness is low, that is, the brittleness is relatively large, and the traditional silicon carbide ceramic processing technology is relatively backward, the product processing is not fine enough, and the production efficiency is slow. In view of the above problems, we propose a silicon carbide ceramic here. The production process of micro components