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Preparation method of tetrafluoromethane

A technology of tetrafluoromethane and fluorocarbons, which is applied in the field of preparation of tetrafluoromethane, can solve problems such as difficult to control and violent heat release, and achieve the effects of low cost, high product purity and short reaction time

Active Publication Date: 2018-11-23
LINHAI LIMIN CHEM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the reaction is violently exothermic and difficult to control, requiring special measures.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] The preparation of embodiment 1 catalyst

[0018] 150kg activated carbon is evacuated under the vacuum pump of -60kPa, carry out pretreatment, in addition 25kg potassium fluoride, 10kg potassium bifluoride, 15kg sodium persulfate are fully mixed and stirred with the above-mentioned activated carbon under normal temperature and pressure, and then Hydrogen fluoride gas was introduced at 250°C for 1 hour to obtain catalyst 1.

Embodiment 2

[0019] The preparation of embodiment 2 catalyst

[0020] First, 25kg of activated carbon and 25kg of molecular sieve are vacuumed under a vacuum pump of -60kPa for pretreatment. In addition, 10kg of chromium trioxide, 25kg of alumina, and 15kg of potassium fluoride are fully mixed with the above-mentioned activated carbon and molecular sieve at normal temperature and pressure. After mixing and stirring evenly, hydrogen fluoride gas was introduced at 150°C for 1 hour to obtain catalyst 2.

Embodiment 3

[0021] The preparation of embodiment 3 catalyst

[0022] First, 150kg of diatomaceous earth and 150kg of silicon dioxide are evacuated under a vacuum pump of -60kPa for pretreatment. In addition, 25kg of magnesium fluoride, 15kg of calcium hydrogen fluoride, and 10kg of potassium persulfate are mixed with the above-mentioned treated under normal temperature and pressure. After diatomaceous earth and silicon dioxide were thoroughly mixed and stirred uniformly, hydrogen fluoride gas was passed through at 180° C. for 3 hours to obtain catalyst 3 .

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Abstract

The invention discloses a preparation method of tetrafluoromethane. Waste gas exhausted in the fluoro-hydrocarbon product production process and hydrogen fluoride are proportionally introduced into amicro-channel reactor containing catalysts; reaction is performed for 1 to 30 minutes at the temperature being 150 to 350 DEG C; reaction products are purified to obtain the tetrafluoromethane; the catalyst is prepared from carriers and one kind of materials or a mixture of more than one kind of materials in persulfate, fluoride or bifluoride of alkali metal or alkaline earth metal and oxides or carbonates of titanium, vanadium, chromium, iron, cobalt, nickel, copper and aluminum through roasting; the carriers are one kind of materials or a mixture of more than one kind of materials in activecarbon, molecular sieve, kieselguhr or silicon dioxide. The catalyst can be continuously used; the reaction time is short; the process is simple; safety is realized; the cost is low; the product purity is high and reach 99.99 percent; the technology belongs to a green clean energy-saving environmental-friendly sustainable production technology.

Description

technical field [0001] The invention relates to a method for preparing tetrafluoromethane from waste gas produced by fluorocarbon products. Background technique [0002] Tetrafluoromethane (CF 4 ) is a colorless, odorless, easy-to-compress incombustible gas at normal temperature and pressure. It is insoluble in water and has high stability. It does not react with acids, alkalis and oxidants at normal temperatures. , Mo and other transition metals react, and do not react with carbon, hydrogen and methane below 1000 °C. It can react with liquid ammonia-metal sodium reagent at room temperature, and can react with alkali metal, alkaline earth metal and SiO2 at high temperature. Due to the strong chemical stability of the carbon-fluorine bond, the CF 4 The representative perfluorocarbons can be considered non-toxic. CF 4 It is the most widely used plasma etching gas in the microelectronics industry. It is widely used in the etching of materials such as silicon, silicon dioxi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C07C17/20C07C17/21C07C19/08
CPCC07C17/206C07C17/21C07C19/08
Inventor 何建明裴文刘乘风卢伟
Owner LINHAI LIMIN CHEM
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