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Array type narrow-band optical filter and preparation method thereof

A narrow-band filter and array technology, applied in filter, optics, optical components, etc., can solve the problems of high transmittance and narrow line width of plasmonic filter, poor out-of-band suppression, etc. , to achieve the effect of narrow line width, weak side peak and low cost

Active Publication Date: 2019-07-12
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In order to solve the above-mentioned technical problems, one of the objects of the present invention is to provide an arrayed narrow-band filter, which solves the problem that the high transmission and narrow line width of the plasmonic filter are difficult to balance and the problem of poor out-of-band suppression;

Method used

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  • Array type narrow-band optical filter and preparation method thereof
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  • Array type narrow-band optical filter and preparation method thereof

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Embodiment 1

[0038] The invention provides an arrayed narrow-band optical filter, comprising a substrate (1) and a first grating and a second grating that are hybridized and nested on the substrate (1). In this embodiment, the first grating is a MIM grating. The second grating is an MI grating, and the MIM grating and the MI grating constitute a plasmonic composite grating, and the period of the plasmonic composite grating is the sum of the widths of the first grating and the second grating; the first grating is along the substrate (1) including the bottom metal layer (2), the dielectric layer (3), and the top metal layer (5) from bottom to top, and the second grating includes the dielectric layer (4) from bottom to top along the substrate (1) ), the top metal layer (6).

[0039] The materials of the two types of grating medium layers are the same as those of the substrate (1), and the materials of the metal layer are the same;

[0040] The period width of each group of plasmonic composit...

Embodiment 2

[0053] A preparation method of an array narrow-band optical filter. The finite difference-time domain (FDTD) algorithm and the surface plasmon dispersion relation are used to determine the period of a plasmon composite grating with a specific working center wavelength. The parameters such as the thickness of the dielectric layer and the ratio of the grating width are further tuned to achieve the required transmittance, bandwidth and side peak suppression, and the plasmonic composite grating structure is determined. Next, the preparation of the filter is finally completed using technologies such as UV lithography, laser direct writing, electron beam evaporation or magnetron sputtering coating, mask lift-off and reactive ion beam etching. Specifically include the following steps:

[0054] S1. Determine the period of the composite grating structure with a specific working center wavelength by using the finite time-domain difference algorithm and the surface plasmon dispersion rel...

Embodiment 3

[0068] S1. Determine the period of the composite grating structure with a specific working center wavelength by using the finite time-domain difference algorithm and the surface plasmon dispersion relationship, and further tune parameters such as the thickness of the dielectric layer and the ratio of the grating width to achieve the required transmittance, bandwidth and side peaks Suppression, to determine the parameters of the plasmonic composite grating;

[0069] Using Bragg coupling and surface plasmon wavenumber matching conditions, the transmission wavelength is calculated as follows:

[0070]

[0071] where λ is the central working wavelength;

[0072] ε m and ε d are the dielectric constants of metal and dielectric materials, respectively, and i is the harmonic resonance order;

[0073] S2: On the substrate (1), using ultraviolet lithography or laser direct writing processing technology, according to the specified working wavelength, the plasmon composite grating ...

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Abstract

The invention relates to an array type narrow-band optical filter which comprises a substrate, a first grating and a second grating, wherein the first grating and the second grating are mutually hybridized and nested on the substrate, the first grating and the second grating form a plasmon composite grating, and the period of the plasmon composite grating is the sum of the width of the first grating and the width of the second grating; the first grating sequentially comprises a bottom metal layer, a dielectric layer and a top metal layer from bottom to top along the substrate, and the second grating sequentially comprises a dielectric layer and a top metal layer from bottom to top along the substrate. The invention also provides a preparation method of the array type narrow-band optical filter, and the optical filter prepared by the preparation method has the excellent characteristics of low cost, narrow line width, weak side peak, miniaturization and the like, and has extremely high application prospect and value in the aspects of biochemical sensing, gas flame detection, multispectral imaging and the like.

Description

technical field [0001] The invention relates to the field of multi-channel micro-nano filters, in particular to an array narrow-band filter and a preparation method thereof. Background technique [0002] Plasmonics is an important branch of nanophotonics, which has far-reaching significance in modern times. It mainly studies the interaction of light and matter at wavelengths (or sub-wavelengths). The optical properties of plasmonic metasurfaces prepared using this theory depend on the dielectric properties of the materials adopted in the structure and the geometry of the system. Through the delicate design, information such as the amplitude, polarization, phase and energy of the active light field can be freely manipulated. Surface plasmon polaritons (SPPs) are undoubtedly representative of this system. Its strong localization and high confinement characteristics can greatly confine and enhance the light field while extremely compressing the thickness of the structure. , ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/20G02B5/18G02B5/00C23C14/35C23C14/30C23C14/18C23C14/04
CPCC23C14/042C23C14/18C23C14/185C23C14/30C23C14/35G02B5/008G02B5/18G02B5/201
Inventor 高劲松高劲柏王笑夷杨海贵刘海王延超
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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