Heavy rare earth metal target material repairing method
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A repair method and metal target technology, which are applied in metal material coating process, ion implantation coating, pressure inorganic powder coating and other directions, can solve problems such as unreusable
Active Publication Date: 2019-10-25
BAOTOU JINSHAN MAGNETIC MATERIAL
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Problems solved by technology
The target material repaired by the repair method provided by the present invention effectively solves the problem that the existing target material cannot be reused after defects are generated on the surface; and the process is simple and the cycle is short, and the repaired target material is used to coat the sintered NdFeB magnet and Diffusion, compared with the original target, the coercive force of sintered NdFeB magnets can be increased by 95-98%, and the use effect is close to that of the new target, but the cost of the target is only 30-40 of the direct use of the new target. %, the cost advantage is very obvious and has good application value
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Embodiment 1
[0036] 1) Pretreat the target to be repaired: that is, use 4wt% sodium hydroxide solution to remove oil, rinse with deionized water, and dehydrate with absolute ethanol;
[0037] Among them, the target to be repaired is a dysprosium-terbium alloy target (the mass ratio of dysprosium to terbium is 1:1, and the sum of dysprosium and terbium content is >99wt%); the surface of the target to be repaired has a "racetrack" type loss area; the target to be repaired The size of the material is 350*125*10mm;
[0038] 2) Dysprosium, terbium, aluminum and gallium with a mass ratio of 4:4:1:1 were melted into alloy ingots in a medium-frequency induction melting furnace, and placed in a hydrogen crushing furnace for hydrogenation at 650°C to obtain alloy powder ;
[0039] 3) Put the pretreated target to be repaired in a rubber mold with a size of 352*127*11mm, add alloy powder to make the alloy powder cover the surface of the heavy rare earth metal target to be repaired, and use vacuum sin...
Embodiment 2
[0043] 1) Pretreat the target to be repaired: that is, use 4wt% sodium hydroxide solution to remove oil, rinse with deionized water, and dehydrate with absolute ethanol;
[0044] Among them, the target to be repaired is a dysprosium-terbium alloy target (the mass ratio of dysprosium to terbium is 1:1, and the sum of dysprosium and terbium content is >99wt%); the surface of the target to be repaired has a "racetrack" type loss area; the target to be repaired The specification of the material is 350*125*10mm;
[0045] 2) Dysprosium, terbium, aluminum and gallium with a mass ratio of 4:4:1:1 were melted into alloy ingots in a medium-frequency induction melting furnace, and placed in a hydrogen crushing furnace for hydrogenation at 650°C to obtain alloy powder ;
[0046] 3) The pretreated target to be repaired is inert to the heavy rare earth metal target with an upper protective cover located on the heavy rare earth metal target and a bottom protective cover located at the botto...
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Abstract
The invention provides a heavy rare earth metal target material repairing method and belongs to the technical field of magnetron sputtering surface treatment. The heavy rare earth metal target material repairing method comprises the following steps: filling the loss area of a to-be-repaired target material with alloy powder, and performing the repairing operation by adopting a vacuum sintering method or a high-pressure cold spraying method, wherein the alloy powder comprises a dysprosium-terbium alloy or one or two of dysprosium and terbium and one or two of metalloids. The heavy rare earth metal target material repairing method provided by the invention has the beneficial effects that the alloy powder is adopted as a repairing material; the repairing operation is performed by adopting thevacuum sintering method or the high-pressure cold spraying method; the alloy powder plays a role in brazing, and thus the sintering temperature during the follow-up target material repairing operation is reduced; furthermore, the diffusion temperature after the film coating operation on a magnetic sheet is reduced, and the repairing difficulty and cost are reduced; according to the structure of the target material repaired through the heavy rare earth metal target material repairing method, the problem that the existing target surface cannot be reused after being defective is effectively solved; and the process is simple, the cycle is short, the use effect is close to a new target material, and the application value is good.
Description
technical field [0001] The invention relates to the technical field of magnetron sputtering surface treatment, in particular to a method for repairing a heavy rare earth metal target. Background technique [0002] Magnetron sputtering has the characteristics of simple operation, easy precise control of process parameters and good film quality. It has become one of the most important coating methods in modern times. It is applied to the surface coating of various materials such as metals, semiconductors and insulators. The advantages of film thickness, large coating area and strong adhesion. Magnetron sputtering introduces a magnetic field on the surface of the target cathode, and uses the magnetic field to confine the charged particles to increase the plasma density to increase the sputtering rate. It is currently widely used in integrated circuits, information storage, liquid crystal displays, laser memories, and electronic controllers. The main electronic information and ...
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Application Information
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