Photoelectric detector based on magnesium nitride film and preparation method thereof

Abstract

The invention discloses a photoelectric detector based on a magnesium nitride film and a preparation method thereof, which belongs to the field of semiconductor photoelectric detectors. The preparation method comprises the steps of firstly, growing a layer of transition metal electrode on a substrate by adopting a magnetron sputtering or evaporation technology; using a wet etching technology or adry etching technology to prepare an interdigital electrode structure ; then growing an Mg3N2 thin film on the substrate with the prepared interdigital electrode structure by adopting a reaction radiofrequency magnetron sputtering method; and finally growing a BN or AlN thin film as an Mg3N2 protective layer on the Mg3N2 thin film in an in-situ sputtering manner, so as to obtain the photoelectricdetection device based on the Mg3N2 thin film. According to the invention, the application of Mg3N2 in the field of photoelectric functional materials and devices is expanded; the BN or AlN thin filmnot only effectively inhibits hydrolysis of the Mg3N2 thin film and improves the stability of the Mg3N2 thin film, but also is transparent in infrared, visible light and most ultraviolet bands, and is an ideal optical window of the Mg3N2 photoelectric device.

Description

technical field [0001] The invention belongs to the field of semiconductor photodetectors, and in particular relates to a photodetector device based on a magnesium nitride thin film and a preparation method thereof. Background technique [0002] A photodetector is a device that converts light signals into electrical signals by using the photoelectric effect of matter. Photodetectors are widely used in various fields of military and national economy, such as ray measurement and detection, industrial automatic control, photometry, regional environmental monitoring, etc., so the research on photodetectors is particularly important. [0003] Magnesium Nitride (Mg 3 N 2 ) is a typical metal nitride, which has many applications in industry. For example, it can be used as a catalyst for the preparation of various ceramic materials. It is a commonly used catalyst material for the preparation of cubic boron nitride, and it is also an ideal hydrogen storage material. In fact, Mg 3...

AI Technical Summary

Problems solved by technology

To develop Mg 3 N 2 Photodetection devices first need to prepare high-quality Mg 3 N 2 Bulk single crystal or large area of ​​Mg 3 N 2 Thin film materials, and research in this area is very scarce

The second is Mg 3 N 2 Very unstable in the air, very easy to react with water vapor in the air, hydrolyzed into magnesium hydroxide and ammonia

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