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Microstructure-based super-infiltration surface and preparation method thereof

A microstructure and super-wetting technology, applied in the direction of microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problems that it is difficult to obtain array-type structures and control the surface morphology of structures.

Pending Publication Date: 2020-07-10
HUNAN UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

Electrochemical methods can prepare superhydrophilic surfaces of polymers without illumination, but their hydrophilicity can only be maintained for 1 to 2 days, and it is difficult to obtain the same array-type structure on the obtained sample surface, and it is difficult to control the surface of the structure. appearance

Method used

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  • Microstructure-based super-infiltration surface and preparation method thereof
  • Microstructure-based super-infiltration surface and preparation method thereof
  • Microstructure-based super-infiltration surface and preparation method thereof

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Embodiment Construction

[0031] Specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings. It should be understood that the embodiments described here are used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0032] Provide the substrate: choose a silicon dioxide substrate, and first use acetone, ethanol, and deionized water to ultrasonically clean it for 10 minutes, blow it dry with nitrogen, and heat it to 120° with a baking plate to keep the sample surface dry.

[0033] Such as figure 1 As shown, first pour SU-83035 on the substrate so that it covers one-third of the substrate, and use a coater to pre-spin and spin coat at a speed of 500r / min for 10s, and then at a speed of 3000r / min Spin coating for 60s to make SU-83035 evenly cover the substrate, put the sample on a hot plate and bake at 65°C for 10min, then bake at 95°C for 90-120min; after baking, the thickness of S...

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Abstract

The invention discloses a microstructure-based super-infiltration surface and a preparation method thereof, and the preparation method comprises the following steps: putting a sample spin-coated withnegative photoresist on a hot plate for baking, and removing a solvent in the photoresist; carrying out patterning exposure on the photoresist by utilizing a photoetching technology to manufacture a microstructure sample; placing the microstructure sample on a hot plate to be baked, using a developing solution for exposure, using oblique angle ion beam etching for processing the developed microstructure sample; and treating the developed microstructure sample by using oxygen plasma to prepare the super-infiltration surface. The microstructure is manufactured by utilizing a photoetching technology, ion beam etching and oxygen plasma treatment, a super-hydrophilic function is realized, and the method can be applied to the fields of self-cleaning, icing prevention, evaporation cooling and thelike.

Description

technical field [0001] The invention belongs to the field of micro-nano manufacturing, and in particular relates to a method for preparing a super-wetting surface based on a microstructure, which can efficiently and reliably prepare a super-wetting surface based on a microstructure. Background technique [0002] A super-wetting surface refers to a surface with special wetting properties among solids, liquids, and gases. Divided into superhydrophilic, superhydrophobic, superoleophilic, superoleophobic and other types, it can be used in anti-icing, marine antifouling, oil-water separation, self-cleaning, cooling, etc. [0003] The traditional superhydrophilic surface generally adopts the sol-gel method. By changing the precursors of hydrolysis and polycondensation, films with different morphology and surface chemical composition can be obtained. This method generally uses ultraviolet light irradiation to obtain superhydrophilicity. , there are certain limitations. Electroche...

Claims

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Application Information

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IPC IPC(8): B81B7/00B81B7/04B81C1/00
CPCB81B7/00B81B7/04B81C1/00206B81B2207/05
Inventor 李平段辉高王兆龙
Owner HUNAN UNIV
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