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Optical and thermal detector based on strontium ruthenate film and preparation method of optical and thermal detector

A thermal detector, strontium ruthenate technology, applied in thermal detectors and its preparation, based on strontium ruthenate film in the field of light, can solve the problems of complex film material components, expensive detector cost, harsh preparation process, etc., to achieve The effect of fast response time, low production cost and simple preparation process

Active Publication Date: 2020-07-10
HEBEI UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the above-mentioned thin film materials have complex components, harsh preparation processes, and poor performance repeatability, and the cost of the detectors is expensive.

Method used

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  • Optical and thermal detector based on strontium ruthenate film and preparation method of optical and thermal detector
  • Optical and thermal detector based on strontium ruthenate film and preparation method of optical and thermal detector
  • Optical and thermal detector based on strontium ruthenate film and preparation method of optical and thermal detector

Examples

Experimental program
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Effect test

Embodiment 1

[0027] Example 1 Detection of 308 nm ultraviolet pulsed laser light and thermal detectors on strontium titanate substrates with strontium titanate obliquely cut at 5 degrees

[0028] The optical and thermal detector of the present invention comprises an obliquely cut substrate, a transverse pyroelectric element, a metal electrode, and a lead wire connected to the metal electrode for outputting a voltage signal from bottom to top; Prepared on cut substrate c Strontium ruthenate thin films grown with tilted axis. The schematic diagram of the detector is shown in figure 1 shown.

[0029] The preparation of the detector includes the following steps:

[0030] 1. Prepare the target material by solid powder sintering method: mix and grind ruthenium oxide and strontium carbonate powder according to the molar ratio Ru:Sr=1:1, and then sinter with gradient temperature increase in the range of 600~1200°C, every 200°C increase Calcination once, 12 hours each time, after each calcinati...

Embodiment 2

[0037] Example 2 Detection of 1550nm near-infrared continuous laser light by photo-thermal detectors on strontium titanate substrates with strontium titanate obliquely cut at 5 degrees

[0038] The central position of the detector surface designed in Example 1 is irradiated with a continuous laser with a wavelength of 1550 nm. Use a voltmeter to record the output voltage signal generated when the continuous laser light of 1550 nm is irradiated on the surface of the strontium ruthenate thin film light and heat detector as Figure 4 As shown, the output voltage signal amplitude of the strontium ruthenate thin-film detector prepared on the 5-degree skew-cut strontium titanate substrate is 37µV, and the sensitivity is high.

Embodiment 3

[0039] Example 3 Detection of 1550nm near-infrared continuous laser light by a strontium ruthenate thin film photo-thermal detector on a 10-degree beveled lanthanum aluminate substrate

[0040] 1. Replace the beveled 5-degree strontium titanate substrate in embodiment 1 with a beveled 10-degree lanthanum aluminate substrate, and other operations are the same as steps 1-4 in embodiment 1; high quality can be obtained cStrontium ruthenate (SrRuO) grown with tilted axis 3 ) thin film (the tilt angle is 10 degrees), the X-ray diffraction pattern of the obtained strontium ruthenate thin film thermoelectric element is as follows Figure 5 shown.

[0041] 2. Irradiate the center of the detector surface with a continuous light laser with a wavelength of 1550 nm. Use a voltmeter to record the output open-circuit voltage signal generated when the continuous laser light of 1550 nm is irradiated on the surface of the strontium ruthenate thin film photo-thermal detector, such as Figure...

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Abstract

The invention provides an optical and thermal detector based on a strontium ruthenate film and a preparation method of the optical and thermal detector. The optical and thermal detector sequentially comprises a beveled substrate, a transverse thermoelectric element, a metal electrode and a lead connected with the metal electrode and used for outputting a voltage signal from bottom to top, the transverse thermoelectric element is a strontium ruthenate thin film which is prepared on the beveled substrate by adopting a pulse laser deposition technology and grows obliquely on a c axis, and the thickness of the strontium ruthenate thin film is 20-200nm. The strontium ruthenate film thermoelectric element has excellent detection performance such as sensitivity and responsivity, has excellent performance such as high sensitivity and short response time when being applied to manufacturing of broadband optical and thermal detectors, has the advantages of simple preparation process and low production cost, and has a wide application prospect in the field of optical and thermal detectors.

Description

technical field [0001] The invention relates to a novel light and heat detector, in particular to a light and heat detector based on a strontium ruthenate thin film and a preparation method thereof. Background technique [0002] When irradiated with a heat source or a laser of a different wavelength c When the surface of a thin film sample grown with an inclined axis, the surface layer of the film will immediately establish a temperature difference between the upper and lower surfaces of the film after absorbing the radiation of light or heat. If the Seebeck coefficient of the film material is anisotropic, an open circuit voltage signal will be output on both sides of the film surface and the amplitude of the signal can be determined by the irradiation power of the laser or heat source, the film c The inclination angle of the axis and the temperature difference between the upper and lower surfaces of the film can be effectively regulated. The thermoelectric effect in which...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L35/22H01L35/34G01J1/42H10N10/855H10N10/01
CPCG01J1/42H10N10/855H10N10/01Y02P70/50
Inventor 陈明敬王淑芳马继奎方立德赵宁傅广生李小亭
Owner HEBEI UNIVERSITY
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