Solar-blind UV detector based on flexible titanium wire/gallium oxide nanoarray and preparation method thereof

An ultraviolet detector and nano-array technology, which is applied in the direction of nanotechnology, nanotechnology, nanotechnology, etc. for materials and surface science, can solve the problem of poor photoelectric performance of amorphous thin films, limited application range of devices, and poor adhesion of electrodes. Solidity and other issues, to achieve excellent solar-blind photoelectric characteristics, controllable size of nano-pillars, and easy to obtain the effect of processing

Active Publication Date: 2021-10-12
杭州紫芯光电有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, flexible optoelectronic products are a research hotspot, attracting more and more attention. They need to be elastic and have a certain curvature surface, while gallium oxide-based photodetector devices are usually grown on rigid substrates such as silicon wafers, sapphire and quartz substrates. Thin films or nanomaterials, none of these devices can be bent, limiting the range of applications of the devices
Although there have been reports in the literature on the growth of amorphous gallium oxide thin films on PEN polymer flexible substrates and the fabrication of flexible solar-blind ultraviolet detectors, the photoelectric properties of amorphous thin films are significantly inferior to those of crystalline highly oriented materials. Moreover, most of the current flexible substrates are polymer compounds, which cannot withstand high temperatures and are not very flexible. Therefore, choosing a flexible substrate that can withstand high temperatures to prepare single crystal or polycrystalline gallium oxide materials is the key to achieving high performance. The key to gallium oxide-based flexible ultraviolet photodetection devices
[0003] So far, related experiments (patent number: 201710012296.2) have been reported on solar-blind ultraviolet photodetectors based on flexible gallium oxide nanobelts, but this type of detector is to transfer the synthesized gallium oxide nanobelts to a flexible substrate. It has the disadvantages of weak electrode bonding, poor stability, and difficult electrode production.

Method used

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  • Solar-blind UV detector based on flexible titanium wire/gallium oxide nanoarray and preparation method thereof
  • Solar-blind UV detector based on flexible titanium wire/gallium oxide nanoarray and preparation method thereof
  • Solar-blind UV detector based on flexible titanium wire/gallium oxide nanoarray and preparation method thereof

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Embodiment 1

[0035] A method for preparing a solar-blind ultraviolet detector based on a flexible titanium wire / gallium oxide nanoarray, comprising the following steps:

[0036] (1) Soak the Ti metal wire in acetone, ethanol, and deionized water for 10 minutes, then rinse it with deionized water after taking it out, and dry it with dry nitrogen; put the cleaned titanium wire into oxygen plasma In the process, the surface of the titanium wire is oxidized to form a dense layer of TiO 2 film, ready to use;

[0037] (2) Take 20 mL of gallium isopropoxide solution with a concentration of 0.5 mol / L and place it in the inner tank of the reactor, and then put several TiO2 obtained in step (1) 2 / Ti metal wire is suspended in the reactor liner and immersed in gallium isopropoxide solution; choose this step to make TiO 2 / Ti metal wire is evenly soaked in gallium isopropoxide solution to facilitate TiO 2 Uniform growth of nanocolumns around Ti metal wires

[0038] (3) Transfer the reactor to an ...

Embodiment 2

[0047] Steps (1), (5) and (6) are all the same as in Example 1. The concentration of gallium isopropoxide solution in step (2) is 0.5 mol / L, in step (3) react at 150°C for 7 hours, hydrothermally grow gallium oxyhydroxide, then transfer GaOOH to a high temperature furnace for annealing at 800°C for 1.5 hours , to obtain TiO 2 / β-Ga 2 o 3 array of nanopillars. In step (4), the concentration of the silver nanowire solution is 0.5 mol / L, and the concentration of graphene is 10 g / L. The resulting TiO 2 / β-Ga 2 o 3 The crystal structure and chemical composition of the nanocolumn array and the photoelectric properties of the solar-blind ultraviolet detector based on the flexible titanium wire / gallium oxide nanoarray are similar to Example 1.

Embodiment 3

[0049] Steps (1), (5) and (6) are all the same as in Example 1. The concentration of gallium isopropoxide solution in step (2) is 0.8mol / L. In step (3), react at 150°C for 8h, hydrothermally grow gallium oxyhydroxide, and then transfer GaOOH to a high-temperature furnace for annealing at 800°C for 1 hour , to obtain TiO 2 / β-Ga 2 o 3 array of nanopillars. In step (4), the concentration of the silver nanowire solution is 0.7mol / L, and the concentration of graphene is 7g / L. The resulting TiO 2 / β-Ga 2 o 3 The crystal structure and chemical composition of the nanocolumn array and the photoelectric properties of the solar-blind ultraviolet detector based on the flexible titanium wire / gallium oxide nanoarray are similar to Example 1.

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Abstract

The invention relates to a solar-blind ultraviolet detector based on a flexible titanium wire / gallium oxide nanoarray and a preparation method thereof. The detector sequentially includes a lower PE protective film, a flexible Ti metal wire lower electrode, and a TiO 2 / β‑Ga 2 o 3 Nano-column array, graphene / Ag nanowire composite electrode, Ag upper electrode and upper PE protective film, wherein the flexible Ti metal wire is a cylinder, and the outside of the Ti metal wire has TiO 2 , β‑Ga 2 o 3 nanopillars located on the TiO 2 top, forming TiO 2 / β‑Ga 2 o 3 array of nanopillars. The solar-blind ultraviolet detector with a PN junction structure of the present invention has a three-dimensional space structure, is flexible and bendable, has stable solar-blind characteristics, good repeatability, excellent chemical and thermal stability, and strong bonding force between the packaged device and the substrate. It can be prepared in a large area and has good repeatability, and is expected to be widely used in the field of wearable and portable ultraviolet detectors.

Description

technical field [0001] The invention belongs to the technical field of ultraviolet photodetectors, and in particular relates to a solar-blind ultraviolet detector based on a flexible titanium wire / gallium oxide nanoarray and a preparation method thereof. Background technique [0002] Gallium oxide is a direct bandgap III-IV wide bandgap semiconductor material with a forbidden band width of 4.2-4.9 eV and a band-edge emission wavelength of 295-254nm. It has unique advantages in the field of deep ultraviolet photodetection, and its With good chemical and thermal stability, it is one of the research hotspots of the third generation of new semiconductor materials in recent years. Compared with thin-film materials, gallium oxide nanomaterials greatly improve their spectral and gas detection sensitivity due to their high surface-to-volume ratio. At present, flexible optoelectronic products are a research hotspot, attracting more and more attention. They need to be elastic and hav...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/0224H01L31/032H01L31/0352H01L31/036H01L31/0392H01L31/0203H01L31/109H01L31/18B82Y30/00B82Y40/00
CPCB82Y30/00B82Y40/00H01L31/0203H01L31/022408H01L31/032H01L31/035227H01L31/035281H01L31/036H01L31/0392H01L31/03926H01L31/109H01L31/18Y02E10/50Y02P70/50
Inventor 陶江伟王顺利张丽滢徐金阳郭道友常裕鑫
Owner 杭州紫芯光电有限公司
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