TiZrMnFe quaternary getter alloy material and preparation method and application thereof

Abstract

The invention discloses a TiZrMnFe quaternary getter alloy material and a preparation method and application thereof. The chemical formula of the TiZrMnFe quaternary getter alloy material is TixZr1-xMnFe (x is equal to 0-0.4), and the TiZrMnFe quaternary getter alloy material is specifically composed of, by mass, 2.3 wt%-10.4 wt% of titanium, 29.6 wt% to 41.6 wt% of zirconium; 27.8 wt% to 29.8 wt%of manganese; and 28.0 wt% to 30.3 wt% of iron. The crystal form of the TiZrMnFe quaternary getter alloy material is a C14 type laves crystal structure, and the grain size of the TiZrMnFe quaternarygetter alloy material is 20 microns to 50 microns. The preparation method comprises the steps that Ti, Zr, Mn and Fe pure metal with a certain stoichiometric ratio is weighed, proportioned and smeltedto obtain an alloy ingot, heat treatment is conducted, and the alloy ingot obtained after heat treatment is subjected to crushing, ball milling and sieving to be prepared into TiZrMnFe air suction alloy powder with different particle sizes. The alloy powder is pressed into getter products in various shapes through a cold press, or alloy powder adsorption slurry is brushed on the surface of a device through an adhesive. The preparation process is simple and feasible, the nitrogen adsorption capacity of the getter per unit mass is high and is superior to that of a ternary ZrMnFe alloy, and thepreparation cost is low.

Description

technical field [0001] The invention relates to a TiZrMnFe quaternary getter alloy material and its preparation method and application, belonging to the technical field of intermetallic compound getter materials. Background technique [0002] The getter material is a kind of active gas (H 2 , CO, O 2 、H 2 O.CO 2 etc.), different from the traditional vacuum acquisition technology, the getter material can maintain the active state for a long time during the storage and use of the vacuum device, continuously absorb various physical and chemical products, and maintain the residual gas in the device. The amount is less than the maximum expected gas load, ensuring high reliability and long-term use of vacuum devices. [0003] ZrMnFe ternary getter material has a good purification and removal effect on gases containing hydrogen isotopes, can effectively crack methane, water vapor, ammonia and other gases, and can also absorb gases such as nitrogen, carbon monoxide and carbon di...

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Problems solved by technology

[0004] But the ZrMnFe ternary getter also has the following deficiencies: one is that the reaction temperature of ZrMnFe reacts with various impurity gases is relatively high, while the reaction temperature for the adsorption of nitrogen is higher (above 700°C); Under the condition of pressure and pressure, ZrMnFe has a relatively low adsorption rate for nitrogen, and it takes a long time to reach saturation. Research data shows that the adsorption saturation time of ZrMnFe-type getter materials for nitrogen needs nearly 72 hours, and the adsorption efficiency is very low; the third is the cost high and expensive

In the prior art, elements with similar atomic structures to the original elements of the getter material are generally used as replacements, or metal elements that have greater reactivity with the gas to be adsorbed by the getter material are added, but the composition of the alloy structure caused by different doping It is difficult to determine the change of the getter alloy. The phase structure and phase distribution of the getter alloy after doping are affected by many factors such as doping amount, preparation process, heat treatment process, etc. It is difficult to determine the various technical factors used to achieve the best getter performance of the getter material. Determined by theoretical methods, it can only be explored and summarized through a large number of repeated experiments; and the improvement trends of various getter performances brought about by the doping of various elements are not consistent, and the same method will enhance a certain adsorption performance of the getter material. However, it may have a weakening effect on other adsorption properties. Often, the gas-absorbing properties of the getter alloy, such as the total amount of gas adsorption, the adsorption rate, and the stability after adsorption, cannot be enhanced by a single element substitution, and assistance is needed. Other modification methods to obtain getter products with the best getter performance in all aspects

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