Preparation method of super capacitor with asymmetric three-dimensional fork comb micro-column array electrode structure

Abstract

The invention discloses a preparation method of a super capacitor with an asymmetric three-dimensional fork comb micro-column array electrode structure, which belongs to the field of micro super capacitors. The super capacitor adopts ICP etching, laser engraving and other micro-nano processing technologies to design and prepare the fork comb micro-column array electrode structure. A layer of gold is sputtered on the surface of the fork comb micro-column array electrode structure to serve as a current collector, and then pseudocapacitor and double-electrode-layer capacitor material films are deposited on the surfaces of the positive electrode micro-structure and the negative electrode micro-structure respectively, so that the asymmetric micro MEMS supercapacitor is prepared. Through the fork comb type micro-column array electrode structure, the specific surface area of the electrode is effectively increased, meanwhile, the asymmetric supercapacitor system can integrate energy storage mechanisms of a double-electric-layer capacitor and a pseudocapacitor, an electrochemical stable window can be widened, the energy storage density of a device can be increased, and the structure can be applied to the fields of node power supplies of the Internet of Things, personal electronic products and the like.

Description

technical field [0001] The invention belongs to the field of micro-supercapacitors, and in particular relates to a method for preparing a supercapacitor with an asymmetrical three-dimensional cross-comb microcolumn array electrode structure. Background technique [0002] With the continuous development of MEMS technology, the volume of microsystems has been continuously reduced, and the degree of intelligence has been continuously improved. However, the miniaturization of devices poses great challenges to power systems. Micro-energy technology, as one of the key technologies of MEMS systems, has been highly valued by governments in recent years. At present, researchers use multi-source composite micro-energy harvesting systems such as photovoltaics, vibration, and temperature difference to obtain higher energy density. However, with the miniaturization of the system volume, the output power of thin-film lithium batteries and miniature nickel-zinc batteries is low. The prob...

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Problems solved by technology

In the application number 2016112187543, a preparation method of an asymmetric supercapacitor uses cuprous oxide as a sacrificial template, stirs at room temperature to obtain cobalt hydroxide, and then sulfides cobalt hydroxide by hydrothermal method to obtain hollow cobalt sulfide powder. This hollow structure can shorten the diffusion distance of ions and improve the utilization rate of active materials, thereby increasing the specific capacitance of the material. An asymmetric supercapacitor is assembled and prepared by using cobalt sulfide powder as the positive electrode and porous carbon material as the negative electrode; However, it is still limited by the complex structure processing technology and electrode film preparation technology, which cannot meet the requirements of the current MEMS technology development for the volume of the microsystem, the energy density and power density of the capacitor; the current supercapacitor is still dominated by comb electrodes , most of which are patterned electrode films processed in a planar structure, the electrode thickness is still low, and the real three-dimensional structure electrode has not yet been realized.

In addition, in the thin film preparation process, the problem of electrode material chapping and falling off is still a key problem to be solved urgently

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