The invention discloses a preparation method of a super
capacitor with an asymmetric three-dimensional fork comb micro-column array
electrode structure, which belongs to the field of micro super capacitors. The super
capacitor adopts ICP
etching,
laser engraving and other micro-nano
processing technologies to design and prepare the fork comb micro-column array
electrode structure. A layer of gold is sputtered on the surface of the fork comb micro-column array
electrode structure to serve as a
current collector, and then
pseudocapacitor and double-electrode-layer
capacitor material films are deposited on the surfaces of the positive electrode micro-structure and the negative electrode micro-structure respectively, so that the asymmetric micro MEMS
supercapacitor is prepared. Through the fork comb type micro-column array electrode structure, the specific surface area of the electrode is effectively increased, meanwhile, the asymmetric
supercapacitor system can integrate
energy storage mechanisms of a double-electric-layer capacitor and a
pseudocapacitor, an electrochemical stable window can be widened, the
energy storage density of a device can be increased, and the structure can be applied to the fields of node power supplies of
the Internet of Things, personal electronic products and the like.