Belonging to the field of fine fluorine chemical industry, the invention in particular relates to a method for preparation of carbonyl fluoride by cracking of a perfluorinated compound and carbonyl fluoride. The following compounds are adopted as the reactant for reaction with oxygen in the presence or absence of a catalyst to produce carbonyl fluoride. The compounds include: 1) perfluoroolefine;2) perfluoroacyl fluoride; and 3) perfluorocarbonyl fluoride. The method of cracking the perfluorinated compound into carbonyl fluoride can convert all the raw materials into carbonyl fluoride, the by-product is few, and the follow-up product separation requirement is low, at the same time toxic and harmful substances in the organofluorine compound can be converted into useful basic raw materials,thus greatly enhancing the utilization of carbon atoms and fluorine atoms, the reaction operation is simple, the safety is greatly improved, and at the same time, the method expands the preparation channels of carbonyl fluoride.