The invention provides a double-layer
capacitor and a manufacturing method thereof. The manufacturing method comprises the following steps: providing a substrate; forming a groove in the insulating layer on the second
metal wire to
expose the second
metal wire; a double-layer
capacitor is formed on the insulating layer on the periphery of the groove and in the groove, a part of the surfaces of the second
electrode and the third
electrode are exposed, and the first
electrode is electrically connected with the second
metal wire; forming a third
dielectric layer to cover the double-layer
capacitor, and forming a first through hole to
expose the second electrode and the third electrode; forming a second through hole in the insulating layer to
expose the first metal wire and the third metal wire; and forming a fourth metal wire to connect the first metal wire and the second electrode and a fifth metal wire to connect the third metal wire and the third electrode. In the invention, the three electrodes of the double-layer capacitor are led out downwards by using the first metal wire, the second metal wire and the third metal wire in the substrate, so that the
process integration difficulty is reduced, and the
capacitance density and the design freedom degree of the double-layer capacitor can be improved.