The application relates to the technical field of target material preparation, and provides a
nickel ferrite target material and a preparation method thereof, which comprises the following steps: providing NiO
powder and Fe2O3
powder, and sequentially mixing, ball milling,
drying and calcining the NiO
powder and the Fe2O3 powder with a dispersant and a
solvent to obtain NiFe2O4 calcined powder; mixing, ball milling and
drying Fe3O4 powder doped with A, the NiFe2O4 calcined powder, the dispersant and the
solvent to obtain mixed powder; A is at least one selected from MnO2, CuO, CoO, Cr2O3 and MgO; and the mixed powder is subjected to pre-pressing treatment and hot-pressing treatment, and then is machined to obtain the
nickel ferrite target material. The Fe3O4 powder doped with A is introduced, Fe 2+ and Fe 3+ exist on octahedral sites in the
crystal structure of the Fe3O4 powder doped with A, so that
electron exchange can be realized through
oxygen ion bridges, a conductive path is constructed in the material, the
conductivity of the target material is improved, and the direct-current
sputtering process requirement is met.