Fluorocarbon/palladium/magnesium-scandium hydrogen-induced color-change film and preparation method thereof

A technology of causing color change and fluorocarbon film, which is applied in the field of fluorocarbon/palladium/magnesium-scandium gas-induced dimming film and its preparation, which can solve the problems that need to be further improved, the dimming range is reduced, etc., and can improve the microstructure and The effect of composition, large dimming range and uniform film layer

Active Publication Date: 2021-08-06
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the hydrogen absorption and desorption rates of the fluorocarbon/palladium/magnesium-niobium pentoxide composite film layer and the fluorocarbon/palladium/magnesium-ruthenium system (the hydrogen absorption reaction time is 80s, 50s respec...

Method used

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  • Fluorocarbon/palladium/magnesium-scandium hydrogen-induced color-change film and preparation method thereof
  • Fluorocarbon/palladium/magnesium-scandium hydrogen-induced color-change film and preparation method thereof
  • Fluorocarbon/palladium/magnesium-scandium hydrogen-induced color-change film and preparation method thereof

Examples

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Embodiment 1

[0047] This embodiment provides a method for preparing a hydrogen-induced chromic thin film of fluorocarbon / palladium / magnesium-scandium, comprising the following steps:

[0048] (1) Use scandium powder with a purity (mass fraction) of 99.99% to make a scandium target, and attach a copper back plate. The same scandium target is used in the following examples 2 to 6;

[0049] (2) Soak the quartz glass sheet with the prepared cleaning solution for 15 minutes successively, and rinse the quartz glass sheet with deionized water for 1 minute; the cleaning solution is a mixed solution of concentrated sulfuric acid and hydrogen peroxide, and the ratio is 3:1; the cleaned quartz glass The substrate is placed in the magnetron sputtering reaction chamber, and the vacuum system is turned on for vacuuming until the background vacuum is 3×10 -4 Pa;

[0050] (3) Heating the substrate so that the temperature of the substrate is 20-25°C, inject working gas A (argon) and maintain a pressure of...

Embodiment 2

[0057] This embodiment provides a method for preparing a hydrogen-induced chromic thin film of fluorocarbon / palladium / magnesium-scandium, comprising the following steps:

[0058] (1) Soak the quartz glass sheet with the prepared cleaning solution for 15 minutes successively, and rinse the quartz glass sheet with deionized water for 1 minute; the cleaning solution is a mixed solution of concentrated sulfuric acid and hydrogen peroxide, and the ratio is 3:1; the cleaned quartz glass The substrate is placed in the magnetron sputtering reaction chamber, and the vacuum system is turned on for vacuuming until the background vacuum is 3×10 -4 Pa;

[0059] (2) Heat the substrate so that the temperature of the substrate is 20-25°C, pass in the working gas A (argon), and maintain a pressure of 0.4-0.6Pa. After the pressure is stable, turn on the power of the palladium, magnesium and scandium targets, and turn off The baffle in front of each target was pre-sputtered to clean the target ...

Embodiment 3

[0065] This embodiment provides a method for preparing a palladium / magnesium-scandium hydrogen-induced chromic film, comprising the following steps:

[0066] (1) Soak the quartz glass sheet with the prepared cleaning solution for 15 minutes successively, and rinse the quartz glass sheet with deionized water for 1 minute; the cleaning solution is a mixed solution of concentrated sulfuric acid and hydrogen peroxide, and the ratio is 3:1; the cleaned quartz glass The substrate is placed in the magnetron sputtering reaction chamber, and the vacuum system is turned on for vacuuming until the background vacuum is 9×10 -5 Pa;

[0067] (2) Heat the substrate so that the temperature of the substrate is 20-25°C, pass in the working gas A (argon), and maintain a pressure of 0.4-0.6Pa. After the pressure is stable, turn on the power of the palladium, magnesium and scandium targets, and turn off The baffle in front of each target was pre-sputtered to clean the target for 10 minutes. Then...

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Abstract

The invention discloses a fluorocarbon/palladium/magnesium-scandium hydrogen-induced color-change film and a preparation method thereof. The film comprises a magnesium-scandium composite film layer, a palladium catalytic layer and a fluorocarbon film layer which are sequentially arranged on a substrate. The preparation method comprises the following steps: firstly, growing the magnesium-scandium composite film layer on the substrate; then, growing the palladium catalytic layer on the magnesium-scandium layer in situ; and finally, depositing the fluorocarbon film layer on Pd. Reversible change-over between hydrogen gas and hydrogen atoms is promoted at a hydrogen suction and separation stage through catalytic effect of palladium; and a composite scandium element is added to accelerate diffusion, in the magnesium matrix, of the hydrogen atoms, so that formation and decomposition of hydrides are quickened, and quick change-over between a reflection state and a transparent state of the film can be realized, and hydrogen suction and discharge circulating durability of the film layer is improved. The whole reaction process can be realized at the room temperature. The light-dimming film has hydrogen suction response, is short in hydrogen removal recovery time, is good in circulating performance, is simple in process, and has an important application prospect in the hydrogen gas sensing field.

Description

technical field [0001] The invention belongs to the technical field of hydrogen-induced chromic films, and in particular relates to a fluorocarbon / palladium / magnesium-scandium gas-induced dimming film and a preparation method thereof. Background technique [0002] As a clean energy carrier, hydrogen will play a key role in the sustainable society in the future. However, when the hydrogen content in the air is between 4% and 75%, it will explode when it encounters an open flame. At the same time, hydrogen has low ignition energy. Molecules are easy to diffuse, so hydrogen leakage and other problems should be avoided during the storage, transportation and use of hydrogen gas. On the other hand, hydrogen gas is colorless, odorless, and tasteless, which cannot be perceived by humans, so it is equipped with sensitive and reliable hydrogen gas detection devices That is, hydrogen sensors are imperative. [0003] Hydrogen detection in the past has mainly been achieved by catalytic ...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/18C23C14/20C23C14/16C23C16/30C23C16/50C23C28/00
CPCC23C14/352C23C14/185C23C14/205C23C14/165C23C16/30C23C16/50C23C28/321C23C28/34
Inventor 方浩澜陈娟彭立明刘峻嘉申炜王廷炎陈炎崔元勋董泽麟管颖添邓南香丁文江
Owner SHANGHAI JIAO TONG UNIV
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