Unlock instant, AI-driven research and patent intelligence for your innovation.

DLC composite film with running-in layer of porous structure and preparation technology thereof

A technology of composite thin film and porous structure, which is applied in metal material coating process, superimposed layer plating, coating and other directions, which can solve the problems of not being able to achieve the desired effect, the influence of coating film forming process characteristics, and large frictional resistance

Active Publication Date: 2021-08-20
ARISON SURFACE TECH SUZHOU
View PDF7 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to meet the wear resistance requirements, the hardness of the DLC coating is required to be above 1500HV, and during the assembly and running-in process of the coated parts, due to the influence of roughness, shape and position tolerance, and material hardness, there will be excessive friction in some mating areas , leading to excessive friction resistance and poor air tightness
[0004] For this kind of phenomenon, it is generally controlled by improving the level of machining accuracy and controlling the taper and thickness uniformity of the coating, but limited by the machining conditions of the machine tool and the characteristics of the coating film forming process, the desired effect cannot be achieved.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • DLC composite film with running-in layer of porous structure and preparation technology thereof
  • DLC composite film with running-in layer of porous structure and preparation technology thereof
  • DLC composite film with running-in layer of porous structure and preparation technology thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] Ultrasonic cleaning of the base material 1 of the part to be coated is carried out in the furnace, heated to 200°C in the coating chamber and vacuumed to within 4mPa; the base material 1 of the part is etched with argon ion, and a 0.2 μm Cr bonding layer 2, 0.2 μm Cr / WC transition layer 3 and 0.2 μm WC-C:H transition layer 4;

[0050] Feed acetylene to adjust the reaction pressure to 0.3Pa, turn on the electromagnetic coil until the magnetic field strength is ≥ 5mT, the bias power supply adopts the constant current pulse output mode: current 5A, pulse frequency 50KHz, duty cycle 80%, deposit 1.5μm hydrogen-containing DLC ​​layer 5 ;Keep the electromagnetic coil open, feed the mixed gas of acetylene and argon, the ratio of acetylene and argon is 10:1; adjust the reaction pressure to 3Pa, set the bias power supply to constant voltage pulse output mode, bias voltage 600V, pulse frequency 50KHz, The void ratio is 80%, and a porous carbon-based running-in layer 6 of 1.5 μm i...

Embodiment 2

[0052] Ultrasonic cleaning of the base material 1 of the part to be coated is carried out in the furnace, heated to 150°C in the coating chamber and vacuumed to within 4mPa; the base material 1 of the part is etched with argon ion, and a 0.2 μm Cr bonding layer 2, 0.2 μm Cr / WC transition layer 3 and 0.2 μm WC-C:H transition layer 4;

[0053] Feed acetylene to adjust the reaction pressure to 0.3Pa, turn on the electromagnetic coil until the magnetic field strength is ≥ 5mT, the bias power supply adopts the constant current pulse output mode: current 5A, pulse frequency 50KHz, duty cycle 80%, deposit 1.5μm hydrogen-containing DLC ​​layer 5 ;Keep the electromagnetic coil open, feed the mixed gas of acetylene and argon, the ratio of acetylene and argon is 10:3; the reaction pressure is adjusted to 5Pa, the bias power supply is set to constant voltage pulse output mode, the bias voltage is 1100V, the pulse frequency is 40KHz, The void ratio is 80%, and a porous carbon-based running...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention discloses a preparation technology of a DLC composite film with a running-in layer of a porous structure. The preparation technology comprises the following steps that the surface of a part base material to be coated is pretreated; a Cr bonding layer, a Cr / WC transition layer and a WC-C:H transition layer are sequentially deposited on the surface of the part base material; a hydrogen-containing DLC layer is deposited on the surface of the WC-C:H transition layer by adopting a PECVD technology; and acetylene and inert gas are introduced, and the porous carbon-based running-in layer is deposited on the surface, deviating from the WC-C:H transition layer, of the hydrogen-containing DLC layer in a bias constant-pressure pulse mode. By means of the preparation technology, the carbon-based running-in layer with a large number of pores in the surface is used for storing a lubricating medium, a lubricating carbon source is provided for friction, the friction coefficient is reduced, and the running-in effect is achieved within a short time.

Description

technical field [0001] The invention relates to the technical field of surface engineering, in particular to a DLC composite film with a porous structure running-in layer and a preparation process thereof. Background technique [0002] DLC (diamond-like carbon) coating is widely used in the field of anti-wear protection of parts based on excellent self-lubricating properties, high nano-hardness and wear resistance, such as precision bearings, aerospace engineering, automotive fuel injection systems, Power transmission systems, pistons, etc. [0003] The conventional DLC coating uses a metal-based film as a supporting transition layer, and the surface layer uses a carbon source to deposit a film. Among them, the graphite target is used to obtain hydrogen-free DLC, and the one obtained from acetylene and other hydrocarbon-based organic substances is hydrogen-containing DLC. In order to meet the wear resistance requirements, the hardness of the DLC coating is required to be ab...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/02C23C14/06C23C16/26C23C16/50C23C28/00
CPCC23C14/025C23C14/0635C23C14/0688C23C16/26C23C16/50C23C28/322C23C28/343C23C28/324
Inventor 毛昌海祖全先
Owner ARISON SURFACE TECH SUZHOU