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Preparation process of Zr-B-N/ZrO2 nano multilayer composite coating with high hardness and high-temperature oxidation resistance

A high-temperature oxidation resistance, nano-multi-layer technology, applied in metal material coating process, coating, ion implantation plating and other directions, can solve the problem of maximum hardness reduction, achieve obvious high temperature resistance, wide application prospects, chemical properties stable effect

Active Publication Date: 2021-11-19
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In order to improve the heat resistance and oxidation resistance of Zr-B-N coatings, a series of Zr-B-O-N coatings with different O contents were subsequently prepared, from a-(BN, B 2 o 3 ) package nc-(ZrO 2 , Zr 3 N 4 ) nanocomposite structure, although the oxidation resistance is improved, but the maximum hardness is reduced to 16.11GPa

Method used

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  • Preparation process of Zr-B-N/ZrO2 nano multilayer composite coating with high hardness and high-temperature oxidation resistance
  • Preparation process of Zr-B-N/ZrO2 nano multilayer composite coating with high hardness and high-temperature oxidation resistance
  • Preparation process of Zr-B-N/ZrO2 nano multilayer composite coating with high hardness and high-temperature oxidation resistance

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Effect test

Embodiment 1

[0038] This example is to prepare Zr-B-N / ZrO with a modulation period of 80nm and different modulation ratios. 2 Nano multilayer composite coating.

[0039] In this embodiment, Zr-B-N / ZrO is deposited on a single crystal Si sheet (40mm×40mm×0.67mm), a cemented carbide sheet (25mm×25mm×3.0mm) and a stainless steel sheet (35mm×35mm×1.0mm). 2 Nano multi-layer composite coating is coated by pulse direct current and high-power pulse composite magnetron sputtering technology. The specific operation steps are as follows:

[0040] (1) After the cemented carbide substrate is polished, place the pre-prepared single crystal silicon wafer and 304 stainless steel sheet in an ultrasonic cleaning machine, and then ultrasonically clean them in acetone and alcohol solutions for 20 minutes, and then use high-purity N 2 (99.999%) blow dry, press at the specified position of the fixture, after the vacuum chamber is vented, open the vacuum chamber furnace door, fix the substrate on the turret in...

Embodiment 2

[0056] This embodiment is to prepare modulation ratio (Zr-B-N layer and ZrO 2 Zr-B-N / ZrO with a layer thickness ratio) of 5:1 and different modulation periods (40, 60, 80, 100, 120nm) 2 Nano multilayer composite coating.

[0057] This embodiment is to deposit Zr-B-N / ZrO under different modulation periods on the mirror-polished single crystal Si sheet ((100) crystal plane) and cemented carbide. 2 Nano multi-layer composite coating, the substrate size is 50mm×10mm×0.7mm. Before coating, the substrate was ultrasonically cleaned in alcohol solution for 20 minutes, then dried with high-purity nitrogen, and placed on the sample holder in the vacuum chamber facing the target. The coating process is carried out on the V-TECH AS610 high-power pulse and pulse DC composite magnetron sputtering coating machine. The coating machine is also equipped with an arc ion plating cathode. The target materials are metal Zr target and compound ZrB 2 Target (purity is wt.99.9%), high-purity Ar (pu...

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Abstract

The invention discloses a preparation process of a Zr-B-N / ZrO2 nano multilayer composite coating with high hardness and high-temperature oxidation resistance, and belongs to the technical field of coatings. According to the process, a nano multilayer composite coating is deposited on a substrate by adopting a high-power pulse magnetron sputtering and pulse direct-current magnetron sputtering composite coating technology, and when the nano multilayer composite coating is deposited, the background vacuum is 5 * 10 <-3 > Pa, and the deposition pressure is 0.5-0.8 Pa; when the Zr-B-N modulation layer is prepared, the power of a Zr target is 0.4-2.0 kw, the power of a ZrB2 target is 0.4-1.6 kw, the bias voltage is 150V, and Ar and N2 / H2 mixed gas are introduced; and when a ZrO2 modulation layer is prepared, a Zr target is started, the power of the Zr target is 0.4-2.0 kw, and Ar and O2 are introduced. According to the preparation process, the coating with high hardness, high wear resistance and high heat resistance is prepared through process design and optimization of the modulation period and the modulation ratio.

Description

technical field [0001] The invention relates to the technical field of coatings, in particular to a Zr-B-N / ZrO with high hardness and high temperature oxidation resistance 2 Preparation process of nanometer multilayer composite coating. Background technique [0002] Nano-multilayer coatings have attracted extensive attention due to their special physical and chemical properties. The properties related to the material surface, such as hardness, high temperature resistance, oxidation resistance, friction resistance, and corrosion resistance, are currently research hotspots. Nano multilayer coating is a multilayer coating with periodic structure formed by the alternate deposition of two or more different materials at the nanometer level. Nano multilayer coatings are mainly divided into metal / metal, metal / nitride (carbide, boride), nitride (carbide, boride) / nitride (carbide, boride), etc., by controlling the multilayer film Modulation period and modulation ratio to obtain nano...

Claims

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Application Information

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IPC IPC(8): C23C14/16C23C14/06C23C14/08C23C14/35C23C14/02
CPCC23C14/165C23C14/067C23C14/0641C23C14/083C23C14/352C23C14/0036C23C14/025
Inventor 王铁钢张纪福张浩琪刘艳梅阎兵朱建博
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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