Piezoelectric element, ink-jet head, angular-rate sensor and its manufacturing method, ink-jet recorder

A piezoelectric element and piezoelectric layer technology, which is applied in the manufacture/assembly of piezoelectric/electrostrictive devices, electrical components, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problem of slow process PZT film , can not get an orientation film, crystal irregularity and other problems, to achieve the effect of reducing manufacturing costs
CN1461703AInactive Publication Date: 2003-12-17PANASONIC CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
PANASONIC CORP
Publication Date
2003-12-17
Estimated Expiration
Not applicable · inactive patent

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Abstract

A piezoelectric element includes a first electrode layer 14 provided on a substrate 11 and made of a noble metal to which at least one additive selected from the group consisting of Mg, Ca, Sr, Ba, Al and oxides thereof is added, an orientation control layer 15 provided on the first electrode layer 14 and made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane, and a piezoelectric layer 16 provided on the orientation control layer 15 and made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane.
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Description

technical field

[0001] The present invention relates to a piezoelectric element exhibiting an electromechanical conversion function, an inkjet head using the piezoelectric element, an angular velocity sensor and a manufacturing method thereof, and an inkjet type recording apparatus equipped with the above inkjet head as a printing apparatus. Background technique

[0002] In general, a piezoelectric material is a material that converts mechanical energy into electrical energy, or converts electrical energy into mechanical energy. As a representative of the piezoelectric material, lead zirconate titanate (Pb(Zr,Ti)O 3 ) (hereinafter referred to as PZT). In this PZT, the direction in which the maximum piezoelectric displacement is obtained is the <001> direction (c-axis direction) in the case of the tetragonal crystal system, and the <111> direction in the case of the rhombohedral crystal system. However, since most piezoelectric materials are polycrystals compose...

Claims

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