Thin films of ferroelectric materials and a method for preparing same
Patent Information
- Authority / Receiving Office
- US · United States
- Current Assignee / Owner
- AGENCY FOR SCI TECH & RES
- Publication Date
- 2006-08-17
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Abstract
Description
FIELD OF THE INVENTION
[0001] The present invention relates to thin films of a ferroelectric material and a method of preparation therefor. In particular the present invention relates to thin films of ferroelectric material with a high mole fraction of Pb(Zn1 / 3Nb2 / 3)O3 in a perovskite phase. BACKGROUND OF THE INVENTION
[0002] In recent years, perovskite oxide solid-solution systems based on ferroelectric Pb(Zn1 / 3Nb2 / 3)O3 (PZN), such as (1-x)Pb(Zn1 / 3Nb2 / 3)O3-xPbTiO3 (PZN-PT); have attracted great attention due to their extremely large electromechanical strain and high dielectric constant. A PZN-PT single crystal exhibits high electromechanical coupling coefficients (k33>90%), and high piezoelectric coefficients (d33>2200 pC / N), properties which are significantly superior to those of the most widely used piezoelectric Pb(Zr,Ti)O3 (PZT) materials. Therefore, the success in developing perovskite PZN-PT bulk single crystal is thought as the most significant breakthrough in piezoele...