Semiconductor chip assembly with post/base/post heat spreader and asymmetric posts
a technology of asymmetric posts and semiconductors, applied in the manufacture of printed circuits, printed circuit aspects, basic electric elements, etc., can solve the problems of short life span, immediate failure of the semiconductor device at high operating temperatures, and heat not only degrades the semiconductor device, so as to achieve excellent heat spreading and heat dissipation, and low cost. , the effect of low thermal conductivity
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[0114]FIGS. 1A-1D are cross-sectional views showing a method of making first and second posts and a base in accordance with an embodiment of the present invention, and FIGS. 1E and 1F are top and bottom views, respectively, corresponding to FIG. 1D.
[0115]FIG. 1A. is a cross-sectional view of metal plate 10 which includes opposing major surfaces 12 and 14. Metal plate 10 is illustrated as a copper plate with a thickness of 500 microns. Copper has high thermal conductivity, good bondability and low cost. Metal plate 10 can be various metals such as copper, aluminum, alloy 42, iron, nickel, silver, gold, combinations thereof, and alloys thereof.
[0116]FIG. 1B is a cross-sectional view of etch masks 16 and 18 formed on metal plate 10. Etch masks 16 and 18 are illustrated as photoresist layers which are deposited on metal plate 10 using dry film lamination in which hot rolls simultaneously press photoresist layers 16 and 18 onto surfaces 12 and 14, respectively. Wet spin coating and curta...
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