This invention relates to the field of precision drive and
positioning technology, and discloses a three-dimensional
macro-micro composite positioning stage, which includes a stage body, an X-axis motion component, a Y-axis motion component, a Z-axis motion component, and a mobile terminal platform connected to the X-axis motion component, Y-axis motion component, and Z-axis motion component respectively. The X-axis motion component includes an X-axis
macro-drive and an X-axis micro-drive; the Y-axis motion component includes a Y-axis
macro-drive and a Y-axis micro-drive; the Z-axis motion component includes a Z-axis macro-drive and a Z-axis micro-drive, used to jointly drive the mobile terminal platform to
linear motion along the X-axis, Y-axis, and Z-axis. This invention balances large
stroke and high precision, achieving three-dimensional positioning with
millimeter-level
stroke and nanometer-level precision. The X-axis, Y-axis, and Z-axis micro-drives use piezoelectric
ceramic direct drive, resulting in high positioning accuracy and fast response speed. The overall structure of this invention is reasonable and compact, and its operation is reliable.