Compound cantilever beam needle point used for micro-nano microtechnique and manufacturing method thereof

Abstract

The invention relates to a compound cantilever beam needle point used for a micro-nano microtechnique and a manufacturing method thereof. The compound cantilever beam needle point comprises a base, a cantilever beam and a needle point and is characterized in that the base, the cantilever beam and the needle point are respectively provided with an insulating dielectric layer which is distributed with four pressure-sensitive resistors with same resistance value, wherein two pressure-sensitive resistors are positioned on the base, and the other two pressure-sensitive resistors are positioned on the cantilever beam and distributed uniformly with the direction being parallel to the length direction of the cantilever beam; and the four pressure-sensitive resistors are connected into a Wheatstone bridge by wires. The compound cantilever beam needle point does not use laser positioning to measure small strain generated by the cantilever beam needle point of a scanning probe microscope, can couple the pressure-sensitive resistors capable of measuring the small strain accurately with the cantilever beam needle point so as to measure dynamical signals when the cantilever beam and a sample act, as well as information of magnitude of electrostatic force and distribution of magnetic field and the like. The invention belongs to the technical field of micro-mechanical sensors.

Description

technical field [0001] The invention relates to a composite cantilever beam tip used in micro-nano microscopy technology and a manufacturing method thereof. Using the composite cantilever beam tip of the invention will no longer use laser positioning and measurement scanning probe microscopes (atomic force microscope, electrostatic force microscope, magnetic force microscope, etc.) Microstrain, etc.) of the cantilever beam tip, but the piezoresistor that can accurately measure the tiny strain is coupled with the cantilever beam tip, and the mechanical signal and the electrostatic force when the cantilever beam interacts with the sample are measured. The information, such as the distribution of the magnetic field, belongs to the technical field of micromechanical sensors. Background technique [0002] With the development of nanotechnology, the requirements for testing methods of micro-nano signals (force, electricity, magnetism, light, etc.) are becoming stronger and stronge...

AI Technical Summary

Problems solved by technology

Although the laser displacement sensor can be positioned more accurately, it is precisely because of its existence that it is difficult to realize the coupling of the scanning probe fiber system with the transmission electron microscope system or scanning electron fiber system due to the complexity of the structure. , even if realized, due to structural limitations, the coupling of the two cannot maximize the advantages of the two

[0003] In a series of articles published since 2002, the M.A.Haque research group mentioned that a nanomechanical sensor for transmission electron microscopy and scanning electron microscopy was fabricated using MEMS technology, and two mark positions were made on the sensor to measure the sample. The strain that occurs, and the mechanical signal applied to the sample is obtained, but as we all know, the field of view in the transmission electron microscope is small, and to monitor the changes in the positions of two marker points with a distance of several hundred μm, it must be done during the experiment. Continuously switch between high and low magnifications, so the opportunity to capture important structural change information may be lost during the process of magnification conversion, and it is impossible to truly monitor the structural changes of the sample in situ and at the same time obtain the occurrence of the sample. The strain and the stress signal applied to the sample

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