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Preparation method of ultrathin nanometer ion liquid lubricating film

A nano-ion and liquid lubrication technology, which is applied in the direction of lubricating compositions, etc., can solve the problems of cumbersome preparation process, increased preparation cost, and increase the overall thickness of the film, and achieve the goal of simplifying the preparation process, low friction coefficient, and reducing the overall thickness Effect

Inactive Publication Date: 2010-06-16
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the thickness of the currently prepared ionic liquid films is generally 30-50nm, which is obviously not suitable for micro / nano devices with usually only a few nanometers between the contact surfaces. Surface pretreatment with silane coupling agent to improve the uniformity of the ionic liquid on the surface will also increase the overall thickness of the film to a certain extent, and make the preparation process cumbersome and increase the preparation cost

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] A. Cut the monocrystalline silicon wafer into small pieces of 10mm×15mm, ultrasonically wash them with double distilled water and acetone for 10-20 minutes, and then dry them with dry nitrogen to obtain a single crystal silicon wafer with a clean surface. The cleaned single crystal silicon wafers were irradiated with ultraviolet light for 2 hours.

[0032] B. Immerse the single crystal silicon wafer irradiated by ultraviolet light into the acetone solution with the mass fraction of 0.1% methyl butyl imidazolium hexafluorophosphate. Lift after staying in the solution for 2 minutes, control the pulling speed to 2mm·s -1 , to obtain samples coated with ionic liquid films.

[0033] C Treat the sample coated with the ionic liquid film at 110°C for 1 hour, and the thickness of the obtained film is about 2nm. Observation with a scanning electron microscope shows that the surface of the film is very uniform.

[0034] Tribological properties:

[0035] The results of friction...

Embodiment 2

[0038] Utilize the method with embodiment 1 step A to obtain the silicon chip of cleaning. The cleaned silicon wafers were exposed to UV light for 4 hours.

[0039] The single crystal silicon wafer irradiated by ultraviolet light was immersed in the acetone solution with a mass fraction of 0.1% methyl butylimidazolium tetrafluoroborate, and other operating steps were the same as Step B of Example 1.

[0040] The operation steps are the same as Step C of Example 1.

[0041] The results of friction and wear tests on GCr15 steel balls show that: when the load is 0.1-0.4N, the sliding speed is 10-40mm s -1 , the stable value of the friction coefficient of the ionic liquid film prepared by the method is 0.07-0.11, and the longest wear life exceeds 7000 times.

Embodiment 3

[0043] Utilize the method with embodiment 1 step A to obtain the silicon chip of cleaning. The cleaned silicon wafers were exposed to UV light for 6 hours.

[0044] The single crystal silicon wafer irradiated by ultraviolet light was immersed in the acetone solution with a mass fraction of 0.2% methylbutylimidazolium hexafluorophosphate, and other operating steps were the same as step B of Example 1.

[0045] The operation steps are the same as step C of Example 1, and the thickness of the obtained ionic liquid film is about 4nm.

[0046] The ionic liquid film prepared by this method was loaded at a load of 0.4N and a speed of 40mm s -1 , the friction coefficient against GCr15 steel balls is stable at 0.06 to 0.10, and the wear life exceeds 10,000 times.

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Abstract

The invention discloses a preparation method of an ultrathin nanometer ion liquid lubricating film. The lubricating film is prepared by a dip coating method, and the total thickness of a thin film is 2-5nm. The invention can be applied to fields of micro / nano electromechanical systems, magnetic recording systems and the like.

Description

technical field [0001] The invention relates to a preparation method of an ultra-thin nanometer ionic liquid lubricating film. Background technique [0002] Micro-motor devices, micro-systems, nanotechnology, and nano-motor devices in the communication industry, aviation technology, biomedicine, and chip laboratories have recently developed rapidly. Most of these devices are fabricated from single or polycrystalline silicon using conventional semiconductor processes. Other materials such as silicon nitride, silicon carbide, nickel, and diamond-like carbon are also used. These materials are often deposited onto silicon substrates in the form of nanofilms to enhance the material's strength, wear resistance, and corrosion resistance. In frequent contact, without effective lubrication, the life of these parts is very short. Therefore, an effective lubricating film is extremely important for the practical application of these micro / nanodevices. [0003] In some past studies, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C10M177/00
Inventor 白明武朱敏赵文杰
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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