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Method for preparing graphene membrane electrode with overlarge area and high quality

A graphene film, super-large area technology, applied in gaseous chemical plating, coating, metal material coating process, etc., can solve the problem of difficulty in forming a single-layer high-quality graphene film, a small graphene film area, and a graphene film. Poor quality and other problems, to achieve the effect of widening the field of use, easy control and low cost

Inactive Publication Date: 2010-06-30
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The catalyst grains on the substrate obtained by the latter method are small and poor in quality, and the graphene film formed on it is of poor quality, and mainly forms multilayer graphene films, and it is difficult to form a single layer of high-quality graphene films
And due to the limitation of the size of the substrate and the space size of the CVD reactor, the area of ​​the generated graphene film is small, which greatly limits the application of graphene.

Method used

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  • Method for preparing graphene membrane electrode with overlarge area and high quality
  • Method for preparing graphene membrane electrode with overlarge area and high quality

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Experimental program
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Effect test

Embodiment 1

[0014] Embodiment 1: Its steps of the preparation method of ultra-large area high-quality graphene film electrode of the present invention are as follows:

[0015] 1) Place a spiral quartz tank with a copper foil (20 microns in thickness and 20×10 cm in size) in the reactor, inject hydrogen at 100 Pa, heat to 1000°C, keep it warm for 20 minutes, and then inject methane Gas 10Pa, keep warm for 20 minutes, then cool down to suffocation temperature at a rate of 10°C / min, turn off the hydrogen and methane gas, and obtain a graphene film on the copper foil. .

[0016] 2) Spray photoresist on the graphene film and bake at 180° C. for 5 minutes to obtain photoresist / graphene / copper foil combination.

[0017] 3) The product obtained in step 2) is immersed in a 10% (mass) ferric nitrate solution, and the copper foil is removed to obtain a photoresist / graphene combination.

[0018] 4) Take the product of step 3) out of the ferric nitrate solution with a glass sheet, put it in deionize...

Embodiment 2

[0020] Embodiment 2: Its steps of the preparation method of ultra-large area high-quality graphene film electrode of the present invention are as follows:

[0021] 1) Place a spiral quartz tank with nickel foil (25 microns in thickness and 20×20 cm in size) in the reactor, inject hydrogen at 1000 Pa, heat to 800°C, keep it warm for 60 minutes, and then inject methane , ethane mixed gas at 10000Pa, keep warm for 1 minute and then cool down to room temperature at a rate of 100°C / min, turn off the mixed gas of hydrogen, methane and ethane, and obtain graphene film on nickel foil.

[0022] 2) Spin-coat PMMA on the graphene film and bake at 100° C. for 10 minutes to obtain a PMMA colloid / graphene / nickel foil combination.

[0023] 3) The product obtained in step 2) is immersed in 40% (mass) ferric nitrate solution, and the nickel foil is removed to obtain the PMMA colloid / graphene combination.

[0024] 4) Take out the product of step 3) from the ferric nitrate solution with a plast...

Embodiment 3

[0026] Embodiment 3: Its steps of the preparation method of ultra-large area high-quality graphene film electrode of the present invention are as follows:

[0027] 1) Place an S-shaped quartz tank with a cobalt foil (20 microns in thickness and 20×20 cm in size) in the reactor, inject hydrogen at 1 Pa, heat to 700°C, keep warm for 0 minutes, and then inject ethanol Gas 0.1Pa, keep warm for 1 minute, then cool down to room temperature at a rate of 5°C / min, turn off the hydrogen and ethanol gas, and obtain a graphene film on the cobalt foil.

[0028] 2) Spin-coat polyimide on the graphene film and bake at 80° C. for 20 minutes to obtain a polyimide colloid / graphene / cobalt foil combination.

[0029] 3) The product obtained in step 2) is immersed in a 25% (mass) hydrochloric acid solution, and the cobalt foil is removed to obtain a polyimide colloid / graphene combination.

[0030] 4) Take the product of step 3) out of the hydrochloric acid solution with a printing paper, put it in...

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Abstract

The invention provides a method for preparing a graphene membrane electrode with overlarge area and high quality, which comprises the following steps of: placing a spiral or S-shaped quartz tank provided with a metal foil into a reactor by adopting a chemical vaporous deposition method, introducing a hydrocarbon for catalytic decomposition to obtain a graphene membrane on the metal foil; attaching an organic colloid on the product to obtain an organic colloid / grapheme / metal foil combination; removing the metal foil by using metal foil corrosive liquid to obtain an organic colloid / grapheme combination; taking out the product in the previous step by using a substrate, placing the product into deionized water, washing and drying to obtain an organic colloid / grapheme / substrate combination; finally, removing the organic colloid by using an organic solvent, taking out and naturally drying to obtain the graphene membrane electrode with overlarge area and high quality, which is positioned on the substrate. The method has simple operation step, large area of the obtained product, low raw material cost, high electrical conductivity and high light transmittance, and is mainly used for the fields of semiconductors, solar batteries, liquid crystal panel display, and the like.

Description

technical field [0001] The invention relates to a preparation method of an electrode material, in particular to a preparation method of a super-large-area high-quality graphene film electrode. Background technique [0002] At present, the widely used transparent electrode material is indium tin oxide (ITO) transparent conductive film, and its light transmittance reaches 90%. , At the same time, the obtained ITO film is brittle, and it is not easy to make a flexible electrode. In recent years, graphene has been discovered as a new carbonaceous material in which a single layer of carbon atoms is tightly packed into a two-dimensional honeycomb structure. Its electrical conductivity is comparable to that of ITO, and its light transmittance can reach 97%. No need for high temperature and high pressure. The preparation methods of graphite thin films that have been studied mainly include micromechanical exfoliation method, liquid phase chemical method, pyrolysis SiC method and ch...

Claims

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Application Information

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IPC IPC(8): C23C16/26C23C16/455C23F1/14C03C17/22C04B41/50
Inventor 陈远富王泽高李言荣
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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