Method for preparing graphene membrane electrode with overlarge area and high quality
A graphene film, super-large area technology, applied in gaseous chemical plating, coating, metal material coating process, etc., can solve the problem of difficulty in forming a single-layer high-quality graphene film, a small graphene film area, and a graphene film. Poor quality and other problems, to achieve the effect of widening the field of use, easy control and low cost
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Embodiment 1
[0014] Embodiment 1: Its steps of the preparation method of ultra-large area high-quality graphene film electrode of the present invention are as follows:
[0015] 1) Place a spiral quartz tank with a copper foil (20 microns in thickness and 20×10 cm in size) in the reactor, inject hydrogen at 100 Pa, heat to 1000°C, keep it warm for 20 minutes, and then inject methane Gas 10Pa, keep warm for 20 minutes, then cool down to suffocation temperature at a rate of 10°C / min, turn off the hydrogen and methane gas, and obtain a graphene film on the copper foil. .
[0016] 2) Spray photoresist on the graphene film and bake at 180° C. for 5 minutes to obtain photoresist / graphene / copper foil combination.
[0017] 3) The product obtained in step 2) is immersed in a 10% (mass) ferric nitrate solution, and the copper foil is removed to obtain a photoresist / graphene combination.
[0018] 4) Take the product of step 3) out of the ferric nitrate solution with a glass sheet, put it in deionize...
Embodiment 2
[0020] Embodiment 2: Its steps of the preparation method of ultra-large area high-quality graphene film electrode of the present invention are as follows:
[0021] 1) Place a spiral quartz tank with nickel foil (25 microns in thickness and 20×20 cm in size) in the reactor, inject hydrogen at 1000 Pa, heat to 800°C, keep it warm for 60 minutes, and then inject methane , ethane mixed gas at 10000Pa, keep warm for 1 minute and then cool down to room temperature at a rate of 100°C / min, turn off the mixed gas of hydrogen, methane and ethane, and obtain graphene film on nickel foil.
[0022] 2) Spin-coat PMMA on the graphene film and bake at 100° C. for 10 minutes to obtain a PMMA colloid / graphene / nickel foil combination.
[0023] 3) The product obtained in step 2) is immersed in 40% (mass) ferric nitrate solution, and the nickel foil is removed to obtain the PMMA colloid / graphene combination.
[0024] 4) Take out the product of step 3) from the ferric nitrate solution with a plast...
Embodiment 3
[0026] Embodiment 3: Its steps of the preparation method of ultra-large area high-quality graphene film electrode of the present invention are as follows:
[0027] 1) Place an S-shaped quartz tank with a cobalt foil (20 microns in thickness and 20×20 cm in size) in the reactor, inject hydrogen at 1 Pa, heat to 700°C, keep warm for 0 minutes, and then inject ethanol Gas 0.1Pa, keep warm for 1 minute, then cool down to room temperature at a rate of 5°C / min, turn off the hydrogen and ethanol gas, and obtain a graphene film on the cobalt foil.
[0028] 2) Spin-coat polyimide on the graphene film and bake at 80° C. for 20 minutes to obtain a polyimide colloid / graphene / cobalt foil combination.
[0029] 3) The product obtained in step 2) is immersed in a 25% (mass) hydrochloric acid solution, and the cobalt foil is removed to obtain a polyimide colloid / graphene combination.
[0030] 4) Take the product of step 3) out of the hydrochloric acid solution with a printing paper, put it in...
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