Method for preparing graphene membrane electrode with overlarge area and high quality
A graphene film, super-large area technology, applied in gaseous chemical plating, coating, metal material coating process, etc., can solve the problem of difficulty in forming a single-layer high-quality graphene film, a small graphene film area, and a graphene film. Poor quality and other problems, to achieve the effect of widening the field of use, easy control and low cost
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[0014] Example 1: The preparation method of the super large area and high quality graphene film electrode of the present invention has the following steps:
[0015] 1) Place a spiral quartz cell with copper foil (thickness of 20 microns and size of 20×10cm) in the reactor, pass hydrogen 100Pa, heat to 1000℃, keep for 20 minutes, then pass methane The gas is 10Pa, after 20 minutes of heat preservation, the temperature is reduced to asphyxia temperature at a rate of 10°C / min, the hydrogen and methane gas are turned off, and a graphene film is obtained on the copper foil. .
[0016] 2) Spray photoresist on the graphene film and bake it at 180°C for 5 minutes to obtain a photoresist / graphene / copper foil combination.
[0017] 3) The product obtained in step 2) is immersed in a 10% (mass) ferric nitrate solution, and the copper foil is removed to obtain a photoresist / graphene combination.
[0018] 4) Remove the product of step 3) from the ferric nitrate solution with a glass slide, put it ...
Example Embodiment
[0020] Embodiment 2: The preparation method of the super large area and high quality graphene film electrode of the present invention has the following steps:
[0021] 1) Place a spiral quartz cell with nickel foil (thickness of 25 microns and size of 20×20cm) in the reactor, and pass hydrogen to 1000 Pa, heat to 800°C for 60 minutes, and then pass in methane , Ethane mixed gas 10000Pa, keep for 1 minute and then cool to room temperature at a rate of 100℃ / min, turn off the mixed gas of hydrogen, methane, and ethane to obtain graphene film on nickel foil.
[0022] 2) Spin-coating PMMA on the graphene film, and bake at 100°C for 10 minutes to obtain a PMMA colloid / graphene / nickel foil combination.
[0023] 3) The product obtained in step 2) is immersed in a 40% (mass) ferric nitrate solution, and the nickel foil is removed to obtain a PMMA colloid / graphene combination.
[0024] 4) Use a plastic sheet to take the product of step 3) out of the ferric nitrate solution, put it in deionized ...
Example Embodiment
[0026] Embodiment 3: The preparation method of the super large area and high quality graphene film electrode of the present invention has the following steps:
[0027] 1) Put the S-shaped quartz tank with cobalt foil (thickness 20 microns, size 20×20cm) in the reactor, and pass hydrogen 1Pa, heat to 700℃, keep for 0 minutes, and then pass ethanol The gas is 0.1Pa, and the temperature is reduced to room temperature at a rate of 5°C / min after holding for another 1 minute. The hydrogen and ethanol gases are turned off to obtain a graphene film on the cobalt foil.
[0028] 2) Spin-coating polyimide on the graphene film and bake at 80°C for 20 minutes to obtain a polyimide colloid / graphene / cobalt foil combination.
[0029] 3) The product obtained in step 2) is immersed in a 25% (mass) hydrochloric acid solution, and the cobalt foil is removed to obtain a polyimide colloid / graphene combination.
[0030] 4) Take out the product of step 3) from the hydrochloric acid solution with a paper shee...
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