Method for manufacturing silicone micro-nano optical structure by using imprinting technology
An optical structure, micro-nano technology, applied in the manufacture of microstructure devices, microstructure devices, optics, etc., can solve problems such as high pressure, and achieve the effects of low transmission loss, excellent optical properties, and improved environmental resistance
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[0032] Example 1
[0033] The silicone micro-nano optical structure is prepared by a hot embossing method, and the specific steps include:
[0034] 1. Use the photonic device simulation software to design and optimize the optical waveguide device, then use the computer-aided design tool to draw the layout of the mask according to the design results, and transfer the designed pattern file to the professional photolithography mask manufacturer for customization;
[0035] 2. Expose the photoresist, and then perform ICP etching to obtain a stamp of silicon or other materials for imprinting; if the minimum line width of the device is relatively high, electron beam exposure or other advanced lithography equipment can be used to customize.
[0036] 3. Hydroxylate the surface of the silicon stamp or other hard template, then place it in a petri dish in an anhydrous environment, inject an appropriate amount of perfluorotetrahydrooctylsilane with a microliter syringe, and heat it f...
Example Embodiment
[0041] Example 2
[0042] 1. Use the photonic device simulation software to design and optimize the optical waveguide device, then use the computer-aided design tool to draw the layout of the mask according to the design results, and transfer the designed pattern file to the professional photolithography mask manufacturer for customization;
[0043] 2. Expose the photoresist, and then perform ICP etching to obtain a stamp of silicon or other materials for imprinting; if the minimum line width of the device is relatively high, electron beam exposure or other advanced lithography equipment can be used to customize.
[0044] 3. Hydroxylate the surface of the silicon stamp or other hard template, then place it in a petri dish in an anhydrous environment, inject an appropriate amount of perfluorotetrahydrooctylsilane with a microliter syringe, and heat it from room temperature to 250°C After the temperature is stabilized, keep it for 2 hours. After cooling, use n-hexane to wash ...
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