Oxide sintered body and tablet obtained by processing same
By adjusting the constituent phases and texture of the oxide sintered body, an oxide sintered body with a density of 3.4–5.5 g/cm³ was prepared, solving the problems of cracking, rupture, and splashing in the ion plating film formation process. This enabled the efficient and stable fabrication of transparent conductive films, suitable for components such as solar cells.
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Embodiment 1
[0119] Indium oxide powder and tungsten oxide powder having an average particle diameter of 1.5 μm or less were used as raw material powders. About each powder, the tungsten content was weighed so that the atomic number ratio of W / (In+W) might be 0.006. Here, 50% by weight of the indium oxide powder and the total amount of the tungsten oxide powder were put into a resin tank together with water, a dispersant, and the like, and mixed with a wet ball mill. At this time, using hard ZrO 2 balls, set the mixing time to 18 hours. After mixing, the slurry was taken out, filtered, and dried to obtain primary mixed powder. Next, the primary mixed powder was heated up at a rate of 1° C. / min in a sintering furnace, and pre-baked at 1250° C. for 10 hours. The remaining indium oxide powder was not pre-fired.
[0120] Next, these calcined powders and non-calcined powders were mixed again using a wet ball mill. After mixing, the slurry was filtered and dried to obtain a secondary mixed ...
Embodiment 2
[0131] Except that the raw material powder was weighed so that the atomic number ratio represented by W / (In+W) was 0.018, an oxide sintered body was produced by the same method as in Example 1, and an ion-plated Use sheet.
[0132] As a result of analyzing the composition of the obtained oxide sintered body by ICP emission spectrometry, it was confirmed that it was substantially the same as the charged composition when weighing the raw material powder. The density of the oxide sintered body was measured and found to be 4.96g / cm 3 .
[0133] Next, phase identification of the oxide sintered body based on X-ray diffraction measurement was carried out. It is confirmed that the oxide sintered body is composed of In 2 o 3 phase and the Indium tungstate compound of In 6 WO 12 phase composition. Next, texture observation of the oxide sintered body and composition analysis of crystal grains by SEM-EDS were performed. As a result of the surface analysis of the element distributi...
Embodiment 3
[0140] Except that the raw material powder was weighed so that the tungsten content was 0.001 in terms of the atomic ratio represented by W / (In+W), an oxide sintered body was produced by the same method as in Example 1, and an ion Plates for plating.
[0141] As a result of analyzing the composition of the obtained oxide sintered body by ICP emission spectrometry, it was confirmed that it was substantially the same as the charged composition when weighing the raw material powder. The density of the oxide sintered body was measured and found to be 4.78g / cm 3 .
[0142] Next, phase identification of the oxide sintered body based on X-ray diffraction measurement was carried out. It was confirmed that the oxide sintered body is only composed of bixbyite-type In 2 o 3 phase composition. Next, texture observation of the oxide sintered body and composition analysis of crystal grains by SEM-EDS were performed. As a result of the surface analysis of the element distribution by ED...
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