Method for preparing high-purity high-density WO3/S core-shell structure nano-particles
A technology of core-shell structure and nanoparticles, which is applied in the field of preparation of high-purity and high-density WO3/S core-shell structure nanoparticles, to achieve the effects of controllable thickness, uniform and controllable particle size, and large output
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[0021] The present invention proposes a high-purity high-density WO 3 / S The preparation method of core-shell structure nanoparticles is characterized in that, the method adopts a vacuum tube furnace, and tungsten oxide (WO 3 ) and sulfur (S) as evaporation sources, through thermal evaporation method, under the protection of carrier gas, one-step synthetic deposition on flat and smooth silicon wafers, gallium arsenide wafers, sapphire wafers or silicon carbide single wafers to obtain high Density of WO 3 / S core-shell structure nanoparticles, and include the following steps and contents:
[0022] (1) The evaporation source used is commercially available analytically pure WO 3 powder and sulfur powder.
[0023] (2) The substrate used is one of silicon wafers, gallium arsenide wafers, sapphire wafers, and silicon carbide single wafers, with a smooth surface and good finish.
[0024] (3) In the vacuum tube furnace, there will be respectively equipped with WO 3 Alumina cerami...
Embodiment 1
[0032] Embodiment 1: will house 0.2g analytically pure WO 3 The powdered alumina ceramic crucible is placed in the central heating zone of the vacuum tube furnace, and a WO 3 An alumina ceramic crucible with 0.01g of analytically pure S powder is placed at 14mm from the crucible of the powder, and a WO 3 A silicon wafer is placed at 22 mm from the crucible of the powder.
[0033] Before heating, vacuumize the whole system first, then pass high-purity argon into the system, and repeat 2 times to remove the air in the system. Then the temperature was raised to 950°C at a rate of 15°C / min and kept for 3 hours. During the heating process, keep the carrier gas flow rate at 300 standard cubic centimeters per minute (sccm), and finally cool down to room temperature naturally, and a large amount of WO can be obtained on the substrate. 3 / S core-shell nanoparticles.
[0034] The synthesized particles have uniform particle size, high density and large output (see figure 1 ). The cor...
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