High-temperature resistance metal ceramic solar energy selective absorbing coating and preparing method

A cermet and absorption coating technology, which is applied in metal material coating process, solar thermal power generation, metal layered products, etc. The effect of stability improvement

Active Publication Date: 2014-01-22
CHANGZHOU DEEP BLUE COATING TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the high-temperature stability of the cermets formed by the composite of the above alloys and oxides is still difficult to guarantee, and needs to be further improved.
In addition, the high melting point of superalloy makes its smelting and target processing more complicated and expensive, and it also faces the disadvantages of low sputtering rate and difficult precise control of composition.

Method used

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  • High-temperature resistance metal ceramic solar energy selective absorbing coating and preparing method
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  • High-temperature resistance metal ceramic solar energy selective absorbing coating and preparing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Place the quartz wafer and (100) single crystal silicon wafer to be plated in the deposition chamber, pre-evacuate, and the background vacuum is 4×10 -4 Pa, heat the quartz sheet and (100) single crystal silicon sheet to make the temperature 150oC, and at the same time pass Ar gas to raise the pressure of the vacuum chamber to 0.45Pa, keep it warm for 50min for desorption, and remove the impurities physically adsorbed on the surface of the substrate. It is beneficial to improve the bonding force between the film and the substrate; then close the introduction of Ar gas, and re-pump the deposition chamber to 1.8×10 -4 Pa, and re-introduce Ar gas to increase the pressure of the deposition chamber to 0.45Pa again; turn on the substrate RF bias, set its power to ~120W and glow, sputter for 15min, and further clean the substrate surface; turn off the cleaning bias At the same time, turn on the driving power of the Ag target and the Al target, adjust its power to 60W, and pre-...

Embodiment 2

[0038] Place the quartz sheet and thermally oxidized stainless steel sheet to be plated in the deposition chamber, pre-evacuate, and the background vacuum is 4.3×10 -4 Pa, heat the quartz sheet and the thermally oxidized stainless steel sheet to 150oC, and at the same time pass in Ar gas to increase the pressure of the vacuum chamber to 0.45Pa, keep it warm for 50min for desorption, remove the impurities physically adsorbed on the surface of the substrate, and facilitate the promotion of the film The binding force between the substrate and the substrate; then the Ar gas is closed, and the deposition chamber is re-pumped to 2×10 -4 Pa, and re-introduce Ar gas to increase the pressure of the deposition chamber to 0.45Pa again; turn on the substrate RF bias, set its power to ~120W and glow, sputter for 15min, and further clean the substrate surface; turn off the cleaning bias At the same time, turn on the driving power of the Ag target and the Al target, adjust the power to 60W, ...

Embodiment 3

[0041] Place the quartz sheet and ordinary soda-lime glass sheet to be plated in the deposition chamber, pre-evacuate, and the background vacuum is 3.7×10 -4 Pa, heat the quartz sheet and (100) single crystal silicon sheet to make the temperature 150oC, and at the same time pass Ar gas to raise the pressure of the vacuum chamber to 0.45Pa, keep it warm for 50min for desorption, and remove the impurities physically adsorbed on the surface of the substrate. It is beneficial to improve the bonding force between the film and the substrate; then close the introduction of Ar gas, and re-pump the deposition chamber to 1.6×10 -4 Pa, and re-introduce Ar gas to increase the pressure of the deposition chamber to 0.45Pa again; turn on the substrate RF bias, set its power to ~120W and glow, sputter for 15min, and further clean the substrate surface; turn off the cleaning bias At the same time, turn on the driving power of the Ag target and the Ti target, adjust the power to 60W, and pre-sp...

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Abstract

The invention provides a high-temperature resistance metal ceramic solar energy selective absorbing coating and a preparing method, and relates to the field of novel high-temperature solar spectrum selective absorbing coating materials and preparation thereof. The high-temperature resistance metal ceramic solar energy selective absorbing coating comprises an infrared reflecting layer, a diffusion impervious layer, an absorbing layer and an antireflection layer from the bottom layer to the surface in sequence, wherein the infrared reflecting layer is composed of a silver aluminum or silver titanium alloy thin film, the diffusion impervious layer is formed by an oxygen-rich aluminum oxide layer, and the absorbing layer is composed of metal ceramic thin films formed by combining silver aluminum or silver titanium alloy particles and aluminum oxide and is structurally formed by the dual-layer metal ceramic thin films which are different in thickness and different in volume percentage of the silver aluminum or silver titanium alloy particles. The coating is good in thermal stability, the comprehensive performance of the coating is enhanced along with the increase of the temperature, and the performance of the coating remains unchanged when the coating is in the high-temperature condition of 450DEG C in a long period. Meanwhile, the coating is simple in preparing technology and good in repeatability.

Description

technical field [0001] The present invention relates to the field of novel high-temperature solar spectrum selective absorption coating material and its preparation, in particular to nano-alloy particles or their clusters formed by alloying noble metal silver (Ag) mixed with aluminum (Al) or titanium (Ti) and embedded in it. Techniques for the construction of novel selectively absorbing coatings in alumina ceramic materials. Background technique [0002] Trough thermal power generation is one of the most mature and widely used focused thermal power generation technologies. Among them, the high-temperature vacuum collector tube is the core of the trough thermal power generation system, and its photothermal conversion efficiency and service life will have an important impact on the efficiency and cost of the thermal power generation system. The improvement of the power generation efficiency of the trough CSP power station requires the heat collector to have a higher operating...

Claims

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Application Information

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IPC IPC(8): F24J2/48C23C14/14C23C14/08C23C14/06C23C14/18C23C14/10B32B15/04
CPCY02E10/40F24S70/225
Inventor 曹鸿涛俞科高俊华
Owner CHANGZHOU DEEP BLUE COATING TECH
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