A kind of preparation method of lithium nitrogen co-doped diamond film

A diamond film and co-doping technology, which is applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problems that there is no preparation method of lithium-nitrogen co-doped diamond film, and achieve high electron migration ability , shallow donor energy level, simple process and equipment

Inactive Publication Date: 2016-04-20
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there is no preparation method of lithium-nitrogen co-doped diamond film in the prior art

Method used

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  • A kind of preparation method of lithium nitrogen co-doped diamond film
  • A kind of preparation method of lithium nitrogen co-doped diamond film

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preparation example Construction

[0015] The invention provides a method for preparing a lithium-nitrogen co-doped diamond film. A layer of suspension containing a Li source is coated on the surface of a substrate on which a diamond film is pre-deposited, and it is put into a hot wire chemical vapor deposition system after being dried. In the reaction chamber, the powder containing the Li source is melted by heating and the Li diffuses into the diamond; the hot wire chemical vapor deposition method is further used to deposit the lithium-nitrogen co-doped diamond film in a nitrogen-containing atmosphere, which specifically includes the following steps:

[0016] Step 1. Dissolving the lithium source solid powder in an organic solvent, and forming a stable suspension by ultrasonic treatment. The specific operation is: dissolving the solid lithium source powder in an organic solvent, and then ultrasonically treating it to prepare a suspension with good stability. The lithium source solid powder is lithium nitride,...

Embodiment 1

[0023] Coat a layer of suspension containing Li source on the substrate surface deposited with nitrogen-doped diamond film, put it into the reaction chamber of the hot wire chemical vapor deposition system after drying, and melt the powder containing Li source by heating And make Li diffuse into the diamond; further adopt the hot wire chemical vapor deposition method to deposit lithium nitrogen co-doped diamond film in nitrogen-containing atmosphere, specifically comprising the following steps:

[0024] Step 1. Dissolving the lithium source solid powder in an organic solvent, and forming a stable suspension by ultrasonic treatment. The specific operation is: dissolving lithium nitride solid powder in chloroform organic solvent, and then ultrasonically treating it to prepare a suspension with good stability.

[0025] Step 2. Coat the prepared suspension on the substrate deposited with a 0.5 μm nitrogen-doped diamond film. After natural drying, place it on the sample stage of th...

Embodiment 2

[0031] Coat a layer of suspension containing Li source on the surface of the substrate deposited with intrinsic diamond film, put it into the reaction chamber of the hot wire chemical vapor deposition system after drying, and melt the powder containing Li source by heating Diffusion of Li into the diamond; further adopting a hot wire chemical vapor deposition method to deposit a lithium-nitrogen co-doped diamond film in a nitrogen-containing atmosphere, specifically comprising the following steps:

[0032] Step 1. Dissolving the lithium source solid powder in an organic solvent, and forming a stable suspension by ultrasonic treatment. The specific operation is: dissolving lithium carbide solid powder in toluene organic solvent, and then ultrasonically treating it to prepare a suspension with good stability.

[0033] Step 2. Coat the prepared suspension on the substrate deposited with a 5 μm intrinsic diamond film. After natural drying, place it on the sample stage of the vacuu...

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Abstract

The invention discloses a preparation method of a lithium and nitrogen co-doped diamond film. The preparation method comprises the following steps: coating a layer of suspension liquid containing a lithium source on the surface of a substrate on which a diamond film is pre-deposited; after drying, putting into a reaction chamber of a heater chemical vapor deposition system, heating in a hydrogen atmosphere to melt powder containing the lithium source and allowing lithium to be dispersed in diamond; subsequently further depositing the lithium and nitrogen co-doped diamond film in a nitrogen-containing atmosphere by adopting a heater chemical vapor deposition method. The lithium and nitrogen co-doped diamond film has low surface work function, is liable to emit electrons under the effect of heat and the effect of an electric field, and can be applied to thermo-electron energy transforming components and field emission display components.

Description

technical field [0001] The invention relates to the field of photoelectric materials, in particular to a method for preparing a lithium-nitrogen co-doped diamond film applicable to thermal electron emission and field emission. Background technique [0002] Diamond has strong covalent bonds and high atomic density, and is a typical atomic crystal, which makes it exhibit distinctive extreme characteristics in terms of physical and chemical properties. It is used in machinery, aerospace, microelectronics, optoelectronics, electrochemical It has important applications in high-tech fields such as biomedicine and biomedicine. These extreme characteristics also make it an ideal material to work in extreme heat, pressure, radiation and chemical environmental media. Intrinsic diamond films with resistivities as high as 10 10 Ω·cm or more, element doping is an effective means to improve the conductivity of diamond films, through element doping can transform diamond from an insulator...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/27
Inventor 邹友生涂承君王凯窦康曾海波
Owner NANJING UNIV OF SCI & TECH
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