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Preparation method for large-size dense barium titanate ceramic target material

A barium titanate and ceramic target technology, which is applied in the field of barium titanate ceramic target preparation, can solve the problem of low sample density and achieve the effect of short sintering time, single phase and high density

Inactive Publication Date: 2014-08-06
WUHAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A barium titanate ceramic target (ZL201010123047) with a density of up to 90% was prepared by hot pressing and sintering of micron powder, but the density of the sample is not high, and the sample size is only 20-50mm

Method used

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  • Preparation method for large-size dense barium titanate ceramic target material
  • Preparation method for large-size dense barium titanate ceramic target material
  • Preparation method for large-size dense barium titanate ceramic target material

Examples

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Effect test

preparation example Construction

[0020] The preparation process of large size and dense barium titanate ceramic target is as follows:

[0021] 1) BaTiO 3 Powder and TiO 2 The powder is mixed at a molar ratio of 1:1, added with absolute ethanol and ball-milled to obtain the mixed raw material, dried and compressed with a tablet machine;

[0022] 2) putting the compressed tablet into an arc melting equipment to smelt under the protection of an argon atmosphere to obtain a block; then ball milling the block to obtain barium titanate powder with a particle size of less than 10 microns;

[0023] 3) Put the powder into a graphite mold and then move it into an FCT electric field activation sintering furnace, apply an axial pressure of 40-60MPa and raise the temperature to 1100°C at a rate of 95-105°C / min, and then increase the temperature at a rate of 8-12°C / min Raise the temperature to 1150°C, keep it warm for 20-30 minutes, lower the temperature, release the pressure and cool with the furnace, and finally get th...

Embodiment 1

[0029] Preparation of barium titanate ceramic target:

[0030] 1) The commercially available BaTiO 3 Micronized powder and commercially available TiO 2 Micropowder, weighed respectively at a molar ratio of 1:1, added absolute ethanol and ball milled and mixed for 2 hours to obtain mixed raw materials, dried the mixed raw materials, and pressed them into discs with a diameter of 10 mm and a thickness of 5 mm with a powder tablet press.

[0031] 2) Vacuum the arc melting equipment first, and then fill it with high-purity argon gas. After 5 times of repeated smelting, the synthesis reaction of barium titanate is fully carried out to obtain a block; the smelted block is broken, and then high-energy After ball milling for 10 hours, pure barium titanate powder with a particle size of less than ten microns was obtained. Gained powder XRD and SEM figure are respectively referred to attached figure 1 And attached figure 2 .

[0032] 3) Put the powder into a graphite mold with a d...

Embodiment 2

[0034] In Example 1, the sintering system was changed to: increase the temperature at a rate of 100°C / min to 1100°C, then increase the temperature at 10°C to 1150°C, and keep the temperature for 20 minutes. Apply a pressure of 40MPa. After reaching the holding time, start to drop the temperature, remove the pressure and cool down with the furnace. Compared with Example 1, the heating mode is changed, and the obtained phase is pure BaTi 2 o 5 , the density reaches 94.3%. The resulting product XRD figure refers to the attached Figure 4 .

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Abstract

The invention discloses a preparation method for a large-size dense barium titanate ceramic target material. The preparation method comprises the following steps: mixing and drying BaTiO3 powder and TiO2 powder in the molar ratio of 1:1, and tableting the dried mixture by using a tableting machine; placing tablets into electric arc melting equipment for melting to obtain a block; crushing the block to obtain barium titanate powder with the particle size of below 10 microns; placing the powder into a graphite mold and then moving the graphite mold into an FCT electric field activated sintering furnace, applying an axial pressure of 40 to 60 MPa, heating to 1,100 DEG C at the heating rate of 95 to 105 DEG C / min, heating to 1,150 DEG C at the heating rate of 8 to 12 DEG C / min, keeping the temperature for 20 to 30 minutes, cooling, depressurizing, cooling the graphite mold along with the furnace, and finally obtaining the barium titanate ceramic target material with the material phase of BaTi2O5 and the density of 90 to 95 percent. Compared with the conventional preparation method for the BaTi2O5 target material, the method provided by the invention has the advantages that the sintering time is short, the size is large and the density is high.

Description

technical field [0001] The invention relates to a method for preparing a barium titanate ceramic target. Background technique [0002] Ferroelectric thin films have good dielectric, piezoelectric, ferroelectric, pyroelectric, photoelectric and nonlinear optical properties, and are widely used in the fields of microelectronics, optoelectronics, integrated optics and microelectromechanical systems. Since most of the ferroelectric thin film materials currently used are lead zirconate titanate, it will inevitably bring harm to the environment and human health after preparation, use and disposal. For this reason, lead-free and environment-friendly ferroelectric thin films are developing rapidly. Barium titanate (BaTi 2 o 5 ) is a new lead-free ferroelectric material. [0003] Physical deposition methods such as pulsed laser deposition and magnetron sputtering are effective means to prepare barium titanate thin films, but these deposition techniques require single-phase, high-...

Claims

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Application Information

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IPC IPC(8): C04B35/468C04B35/622
Inventor 李俊国王传彬彭健王博沈强张联盟
Owner WUHAN UNIV OF TECH
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