Manufacturing method for PERL crystalline silicon solar cell capable of being massively produced

Abstract

The invention provides a manufacturing method for a PERL crystalline silicon solar cell capable of being massively produced. The method comprises the steps of removing damage of a silicon wafer and making herbs into wool, cleaning the silicon wafer, conducting phosphorus diffusion, removing phosphorosilicate glass on the back face, polishing the back face, removing and cleaning the phosphorosilicate glass, conducting back face aluminum oxide / silicon nitride laminated thin film growth, conducting front face silicon nitride anti-reflection thin film growth, printing type-p dopant on the back face, conducting drying, adopting laser to conduct local area heavy doping on the type-p dopant printing area of the back face, conducting ultrasonic cleaning, printing a back electrode and an aluminum back field on the back face, printing sliver grid lines on the front face, and conducting sintering and testing. According to the manufacturing method for the PERL crystalline silicon solar cell capable of being massively produced, the steps are simple, and operation is easy. The manufacturing method has the advantages that on the basis of business-like industrial equipment, existing conventional cell production equipment of an enterprise production line at present is fully utilized, the equipment investment is fully reduced, and the manufacturing cost of the cell per watt is not increased.

Description

technical field [0001] The invention belongs to the field of crystalline silicon solar cell manufacturing, and relates to a back field passivation of a crystalline silicon solar cell and local doping of a metallized region to form a local back field technology, in particular to a mass-producible PERL crystalline silicon solar cell production method. Background technique [0002] Against the backdrop of increasingly prominent problems such as energy scarcity, resource shortage, and environmental pollution, the use of natural resources for solar power generation has been regarded as a countermeasure to solve the problems of global warming and fossil fuel depletion, and has been favored by countries all over the world. However, the high production cost restricts its application range, and with the sharp reduction of government subsidies, reducing the production cost of cells and improving power generation efficiency has become an urgent issue for manufacturers. [0003] The in...

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Problems solved by technology

[0007] Although the cell structure was proposed by the University of New South Wales in Australia as early as the 1990s and obtained the world record of 25% crystalline silicon solar cells, a process method suitable for industrial production has not been determined.

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