Method for preparing microfluidic doped nanocrystal lasers using femtosecond pulsed laser
A femtosecond pulse, micro-channel technology, applied in the manufacture of micro-structure devices, processes for producing decorative surface effects, micro-structure technology, etc., can solve the problems of complicated design and preparation of micro-channel chips, and achieve laser medium Diversification, strong controllability, simple process and environmental protection effect
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Embodiment 1
[0035] See figure 1 The structure shown, the process steps are as follows:
[0036] (1) Writing of microchannel pattern
[0037] Take a fused silica glass sample with a size of 10mm×10mm×1mm and six-sided polishing as the base material, clean the fused silica glass 11 and fix it on the electronically controlled translation stage 12, and the pulsed laser beam emitted by the femtosecond pulsed laser source 1 passes through the The beam splitter 2 with a split ratio of 1:9, the adjustable attenuation plate 3, the half-wave plate 4, the polarizer 5 and the mechanical shutter 6 are transmitted, and then pass through the first mirror 7, the second mirror 8 and the third mirror in turn 9 is reflected into the microscopic objective lens 10, irradiated to the surface of the fused silica glass 11 after being focused by the microscopic objective lens 10, and the fused silica glass 11 is irradiated controllably according to the designed micro-channel pattern, that is, the fused silica gl...
Embodiment 2
[0045] The difference between the method of preparing a microchannel-doped nanocrystal laser using a femtosecond pulsed laser described in this example and Example 1 is that the base material in step (1) is calcium fluoride crystal, and the hydrofluoric acid The mass concentration of mass concentration is 20%; The diameter size that obtains microchannel in the step (2) is 1 μm; The doping laser material used in the step (3) is doping YAG, and the crystal grain of gained doping nanocrystalline material is rod-shaped, The size of the rod-shaped grains is 20-100nm; the dispersion liquid described in the step (4) is distilled water, and the optical signal is coupled using an objective lens on the exit surface of the micro-channel, and the obtained micro-laser element 25 adopts polydimethylsilicon Oxane can be encapsulated.
Embodiment 3
[0047] The difference between the method of using femtosecond pulsed laser to prepare microchannel doped nanocrystal laser described in this embodiment and embodiment 1 is that the base material in step (1) is a silicon wafer, and the mass of the hydrofluoric acid Concentration is 5%; The diameter size that obtains microchannel in the step (2) is 15 μ m; The doping laser material used in the step (3) is doping ZnS, and the crystal grain of gained doping nanocrystalline material is rod shape, 20~ 100nm; the dispersion liquid in step (4) is ethanol, and the optical signal coupling on the exit surface of the micro-channel adopts waveguide coupling technology. The obtained micro-laser element 25 can be packaged with polymethacrylic acid.
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