A SIC-based micro-optical high-temperature accelerometer and its design method

Abstract

The invention discloses a SiC-based micro-optics high-temperature accelerometer and a design method, and belongs to the MOEMS technology field. A malposed double-FP cavity structure is formed through cavity length difference design, a mode of linear region overlapping of two paths of return signals in alternative change is achieved, and the measuring range of the accelerometer is widened. Through a mode of plating of a high-temperature anti-reflection film on a surface of a mass block, noise interference is reduced, and therefore the measuring precision is raised. The micromachining manufacturing technology of the sensing structure of the SiC-based micro-optics high-temperature accelerometer is provided, and the high temperature resistant characteristic of the sensing head of the accelerometer is achieved supplemented by a combined structure of an optical fiber with high temperature resistance and a hollow aligning sleeve and high temperature resistance packaging design. Through design of the SiC-based circle-round cantilever beam-mass block sensing structure, excellent mechanical response characteristics and displacement sensitivity of the sensing head are achieved. Severe environment working capabilities such as high temperature resistance or the like of the accelerometer are raised, and performances at aspects of measurement precision, dynamic measurement scope and miniaturization and the like are excellent.

Description

technical field [0001] The invention belongs to the technical field of MOEMS (micro-opto-electro-mechanical-system, micro-opto-electro-mechanical-system), and relates to a design method of an optical path and a mechanical system of a novel high-temperature-resistant micro-optical accelerometer based on the third-generation semiconductor SiC. Background technique [0002] SiC-based micro-accelerometer is a new type of high-stability acceleration sensor developed with the development of SiC material and its micro-processing technology. After entering the atmosphere, due to the severe friction with the air, the surface temperature of the aerospace vehicle is as high as 1000°C. The control of its flight attitude is closely related to the aerodynamic environment in the process of high-speed flight. The dynamic real-time measurement of vibration parameters poses a serious challenge to the existing testing technology. The technical indicators of high-precision accelerometers inclu...

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Problems solved by technology

[0004] Since Okojie et al. of the NASA Glenn Research Center in the United States proposed the piezoresistive 6H-SiC accelerometer in 2003, a large number of studies have been carried out abroad on the use of SiC to make accelerometers and pressure sensors. Foreign piezoresistive and capacitive SiC micro-accelerometers have been There are commercial products, and the working temperature reaches 600°C and 400°C respectively, but the research field of SiC micro-optical accelerometer is still blank at home and abroad.

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