Ultraviolet detector based on gallium oxide nanowire array and preparation method thereof

A nanowire array, gallium oxide technology, applied in semiconductor devices, electrical components, final product manufacturing, etc., can solve the problems of weak signal processing ability, interference, etc., and achieve the effect of sensitive response, stable performance and rapid compounding
CN105655434AActive Publication Date: 2016-06-08东港智科产业园有限公司
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
东港智科产业园有限公司
Publication Date
2016-06-08

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Abstract

The invention relates to an ultraviolet detector based on a nanowire array, in particular to an ultraviolet detector based on a gallium oxide nanowire array and a preparation method thereof. The method comprises the steps that a gold thin film is deposited on an Al2O3 sapphire substrate through the radio frequency magnetron sputtering technology, then, spheroidizing annealing is performed on the obtained gold thin film and therefore gold particles are obtained; finally, Ga2O3 nanowire arrays grow on the gold particles. A photoelectric performance testing result of the ultraviolet detector shows that the detector has the good photoelectric response. The ultraviolet detector has the advantages that the obtained ultraviolet detector based on the gallium oxide nanowire array is stable in performance, has the strong photoelectric response to deep ultraviolet ray of a sun blind region, and is sensitive in reaction, small in dark current, capable of being applied to detection of fire alarm, high-voltage power line corona and the like; in addition, the preparation method has the advantages of being high in technological controllability, easy to operate, good in universality and capable of achieving restorability during repeated tests, and has the great application prospect.
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Description

technical field

[0001] The invention relates to an ultraviolet detection device of a nanowire array, in particular to an ultraviolet detection device based on a gallium oxide nanowire array and a preparation method thereof. technical background

[0002] Because high-voltage line corona, space, missile plume and flames all contain ultraviolet radiation, ultraviolet detection technology is used in many fields such as military affairs, scientific research, aerospace, and communication electronics. β-Ga 2 o 3 It is a semiconductor material with deep ultraviolet characteristics, 200nm β-Ga 2 o 3 The film can achieve a transmittance of more than 80% in the ultraviolet region, making up for the shortcomings of traditional TCO materials in the deep ultraviolet region; and because of the relatively wide band gap, β-Ga 2 o 3 It can emit light with a shorter wavelength, and can also be used to make deep ultraviolet photoelectric devices by doping rare earth elements such as Mn, Cr...

Claims

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