Device for recycling argon through single-tower low-temperature rectification and method for purifying and recycling argon

Abstract

The invention provides a device for recycling argon through single-tower low-temperature rectification. The device comprises the following equipment: an argon recycling compressor, a first crude argon pre-cooling machine (3), an oil filter (4), an active carbon adsorber (5), an oxygen remover (6), a cooler (7), a second crude argon pre-cooling machine (8), a purifier (9) and a rectification cold box (10), wherein a heat exchanger (11), a reboiler (12), a rectification tower (14), a condensation evaporator (16) and a condensation evaporator shell (17) are arranged in the rectification cold box (10). The invention also provides a method for purifying and recycling the argon. According to the device and the method, which are provided by the invention, the convenience that a liquid argon providing system exists in a recovery scene is effectively utilized, loss of cooling capacity is supplemented by liquid argon and an expansion machine does not need to be provided singly; the recovery rate of the argon and the utilization rate of hydrogen are increased, operation is simplified, and operation energy consumption is reduced; thereby, the device and the method have good market prospects.

Description

technical field [0001] The invention belongs to the field of gas production, and relates to a device and method for purifying and recovering gas, in particular to a device for recovering argon by single-tower low-temperature rectification, and also relates to a method for purifying and recovering argon implemented by the device. Background technique [0002] Argon is a colorless, odorless inert gas with molecular formula Ar, molecular weight 39.95, vapor pressure 202.64kPa (-179°C), melting point -189.2°C, boiling point -185.7°C. In industrial production, argon is usually used as an efficient protective gas and is widely used; for example, argon is also commonly used in the production process of single crystal silicon. [0003] The Czochralski method (Czochralski method) is the main method for producing monocrystalline silicon, and 70% to 80% of the world's monocrystalline silicon is produced by the Czochralski method. The most commonly used Czochralski process for producin...

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Problems solved by technology

However, the low-temperature rectification part of this method uses air circulation refrigeration, which has high energy consumption, complicated process, and the excess hydrogen added is vented, so the utilization rate is low.

[0007] As another example, CN104406364A discloses a double-tower coupled argon recovery and purification equipment and argon recovery and purification method, in which a series of equipment such as a low-temperature rectification tower with a coupling structure of upper and lower towers is used; although the argon recovery rate obtained by this method High and high purity, but the equipment used has high energy consumption and no advantages, and the structure is complex, which increases the investment cost of equipment, makes the operation too cumbersome, and is not conducive to large-scale industrial production

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