Fluorine-fixing agent with high utilization rate and preparation method thereof

A technology of fluorine-fixing agent and utilization rate, applied in separation methods, chemical instruments and methods, gas treatment, etc., can solve the problem that the utilization rate of fluorine-fixing agent does not meet the industrial requirements, and achieve easy control of preparation process parameters and high reactivity , the effect of high utilization rate

Active Publication Date: 2018-09-28
YANTAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Compared with the existing technical requirements, the above-mentioned use of Al 2 o 3 The utilization rate of the fluorine-fixing agent of the method has not yet reached the industry requirement

Method used

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  • Fluorine-fixing agent with high utilization rate and preparation method thereof
  • Fluorine-fixing agent with high utilization rate and preparation method thereof
  • Fluorine-fixing agent with high utilization rate and preparation method thereof

Examples

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Comparison scheme
Effect test

Embodiment 1

[0045] Get 8 grams of glucose, dissolve it in 45 milliliters of deionized water, make a solution, move to an autoclave equipped with a 100 milliliter polytetrafluoroethylene liner, place the autoclave in an oven, and let the autoclave stand. Raise to 180C with a heating rate of 10C / min, and react at a constant temperature for 6 hours. The precipitate was washed alternately with deionized water and ethanol. Dry at 80C for 12 hours to obtain carbon spheres.

[0046] Take 2.5321 grams of aluminum nitrate and 1.6216 grams of urea, dissolve them in 45 milliliters of deionized water, add them to 1 gram of carbon spheres, stir and sonicate for 10 minutes, and transfer them to a self-pressurized autoclave equipped with a 100 milliliter polytetrafluoroethylene liner , put the autoclave in an oven, rotate the autoclave, raise the temperature to 120C at a rate of 10C / min, react at a constant temperature for 4 hours, wash the product with deionized water and ethanol, and dry at 80C for 1...

Embodiment 2

[0049] Get 0.1235 grams of cobalt nitrate and 0.1019 grams of urea, dissolve them in 45 milliliters of water, add them to 0.5 grams of the thin-shelled alumina prepared in "Example 1", stir and sonicate for 10 minutes, and move to a 100-ml In the autoclave with polytetrafluoroethylene liner, put the autoclave in the oven, rotate the autoclave, raise the temperature to 120C at a rate of 5C / min, react at constant temperature for 4 hours, and wash the product with deionized water at 80C Let dry for 12 hours. Raise the temperature to 600C at a rate of 5C / min in the air, and roast the above product for 4 hours at a constant temperature to obtain a thin-shelled Al as a defluorinating agent. 2 o 3 Load Co 3 o 4 , denoted as 5%Co / Al 2 o 3 (The mass of cobalt accounts for 5% of the mass of alumina). for NF 3 Anhydrous decomposition reaction, NF 3 Decomposition reaction condition is identical with embodiment one, NF 3 See the appendix for the decomposition percentage data fig...

Embodiment 3

[0051] Get 0.1628 grams of manganese nitrate solution and 0.1093 grams of urea with a mass concentration of 50%, dissolve them in 45 milliliters of water, add them to 0.5 grams of the thin-shelled aluminum oxide prepared in "Example 1", stir and sonicate for 10 minutes , moved to an autoclave equipped with a 100 ml polytetrafluoroethylene liner, put the autoclave in an oven, rotate the autoclave, rise to 120C at a heating rate of 5C / min, and react at a constant temperature for 4 hours, the product Wash with deionized water and dry at 80C for 12 hours. In the air, the temperature was increased to 600C at a rate of 5C / min, and the above product was roasted at a constant temperature for 4 hours to obtain a thin-shell Al 2 o 3 Load Mn 2 o 3 , denoted as 5%Mn / Al 2 o 3 (The mass of manganese accounts for 5% of the mass of alumina). for NF 3 Anhydrous decomposition reaction, NF 3 Decomposition reaction condition is identical with embodiment one, NF 3 See the appendix for the...

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Abstract

The invention relates to a fluorine-fixing agent with a high utilization rate and a preparation method thereof. The preparation method comprises synthesizing Al2O3 with thin-shell morphology, adding aurea, manganese nitrate or cobalt nitrate aqueous solution into the Al2O3, carrying out rotation crystallization in an autoclave to obtain a thin-shelled Al2O3-supported Mn2O3 or Co3O4 precursor, andcalcining the precursor in air to obtain a thin-shelled Al2O3-supported Mn2O3 or Co3O4 fluorine-fixing agent, wherein the mass ratio of the manganese or cobalt atoms to Al2O3 is 3% to 8% and the optimum mass ratio is 5%. The fluorine-fixing agent is used for decomposing the nitrogen trifluoride waste gas discharged through the electronics industry, has high fluorine-fixing agent reactivity, has ahigh use rate of 98% and realizes recovery of the fluorine resource.

Description

technical field [0001] The invention relates to a fluorine-fixing agent with high utilization rate and a preparation method thereof, which can be used for decomposing nitrogen trifluoride waste gas discharged from the electronic industry, and belongs to the field of environmental protection. Background technique [0002] Anthropogenic emissions of greenhouse gases have led to an upward trend in ground temperature, which has aroused widespread concern from the international community. Nitrogen trifluoride (NF) as etching gas and cleaning gas in the electronics industry 3 ) is one of the important greenhouse gases, its greenhouse effect potential value is 17200, and its life span is about 740 years. NF after use 3 If the exhaust gas is directly discharged into the atmosphere, it will cause serious harm to the ecological environment. [0003] Current NF 3 Exhaust gas treatment methods include: high temperature calcination method, catalytic hydrolysis method, anhydrous decom...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/81B01D53/68
CPCB01D53/68B01D53/81B01D2257/204
Inventor 徐秀峰李和健潘燕飞
Owner YANTAI UNIV
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