Ozone gas-sensitive material, preparation method thereof, ozone gas-sensitive device, preparation method of ozone gas-sensitive device
A technology of ozone gas and devices, which is applied in the field of semiconductor gas sensor components, can solve the problems of low working temperature and high response sensitivity
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Embodiment 1
[0031] Preparation of ozone gas sensor
[0032] (1) Weigh 35.06g (0.1mol) SnCl 4 ·5H 2 O was dissolved in 1L of water, and 21.0g (0.1mol) of C 8 h 8 o 7 ·H 2 O was dissolved in 1L of water, and the two solutions were mixed uniformly to obtain solution I;
[0033] (2) 23.80g (0.2mol) CoCl 2 ·6H 2 O was dissolved in 1L of water to obtain solution II;
[0034] (3) Mix and stir the solution I and the solution II under magnetic stirring, add 1L of 0.6mol / L NaOH solution and stir for 15-30min, add 1L of 3mol / L NaOH solution and stir for 15min to obtain a mixed solution, and then The obtained mixed solution was transferred into a reaction kettle for solvothermal reaction at 180° C. for 12 hours, then the reaction kettle was naturally cooled to room temperature, and the reaction product was suction filtered, washed and dried to obtain the precursor cobalt hydroxide nanopowder.
[0035] 4) Put the obtained precursor cobalt hydroxide nanopowder into a muffle furnace and heat up...
Embodiment 2
[0039] Preparation of ozone gas sensor
[0040] (1) Weigh 1.052g (3mmol) SnCl 4 ·5H 2 O was dissolved in 10mL water, 0.63g (3mmol) C 8 h 8 o 7 ·H 2 O was dissolved in 10mL of water, and the two solutions were mixed uniformly to obtain solution I;
[0041] (2) 0.7138g (3mmol) CoCl 2 ·6H 2 O was dissolved in 10 mL of water to obtain solution II;
[0042] (3) Mix and stir the solution I and the solution II under magnetic stirring, add 10mL of 3mol / L NaOH solution and stir for 15-30min, add 20mL of 7.5mol / L NaOH solution and stir for 15min to obtain a mixed solution, and then the obtained The mixed solution was transferred into a reactor for solvothermal reaction, and reacted at 200° C. for 8 hours, then the reactor was naturally cooled to room temperature, and the reaction product was suction filtered, washed, and dried to obtain the precursor cobalt hydroxide nanopowder.
[0043] 4) Put the obtained precursor cobalt hydroxide nanopowder into a muffle furnace and heat up...
Embodiment 3
[0047] Preparation of ozone gas sensor
[0048] (1) Weigh 2.805g (8mmol) SnCl 4 ·5H 2 O was dissolved in 20mL water, 1.680g (8mmol) C 8 h 8 o 7 ·H 2 O was dissolved in 20mL of water, and the two solutions were mixed uniformly to obtain solution Ⅰ;
[0049] (2) 1.903g (8mmol) CoCl 2 ·6H 2 O was dissolved in 20mL of water to obtain solution II;
[0050] (3) Mix and stir the solution I and the solution II under magnetic stirring, add 20mL of 3.6mol / L NaOH solution and stir for 15-30min, add 40mL of 7.2mol / L NaOH solution and stir for 15min to obtain a mixed solution, then The obtained mixed solution was transferred into a reactor for solvothermal reaction, and reacted at 120° C. for 8 hours, then the reactor was naturally cooled to room temperature, and the reaction product was suction filtered, washed, and dried to obtain the precursor cobalt hydroxide nanopowder.
[0051] 4) Put the obtained precursor cobalt hydroxide nanopowder into a muffle furnace and heat up at 300...
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