Fluorocarbon/palladium/magnesium-niobium pentoxide gas dimming film and preparation method thereof

A technology of niobium pentoxide and light-adjusting film, which is applied in gaseous chemical plating, ion implantation plating, superimposed layer plating, etc., can solve the problems of corroding light-adjusting film, reducing the proportion of pure palladium, reducing catalytic efficiency, etc. , to achieve the effect of simple process, short recovery time and high degree of automation

Active Publication Date: 2019-01-04
SHANGHAI JIAO TONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the magnesium-based alloy and the palladium layer are easy to diffuse each other, forming new alloy layers such as palladium-magnesium or palladium-alloying elements, reducing the proportion of pure palladium and reducing the catalytic efficiency
More importantly, palladium has poor hydrophobicity, and water molecules generated by dehydrogenation and water vapor in the air are easy to gather on the surface of the palladium layer and corrode the dimming film.

Method used

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  • Fluorocarbon/palladium/magnesium-niobium pentoxide gas dimming film and preparation method thereof
  • Fluorocarbon/palladium/magnesium-niobium pentoxide gas dimming film and preparation method thereof
  • Fluorocarbon/palladium/magnesium-niobium pentoxide gas dimming film and preparation method thereof

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Experimental program
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Embodiment 1

[0044] This embodiment provides a method for preparing a gas-induced dimming film of fluorocarbon / palladium / magnesium-niobium pentoxide, which includes the following steps:

[0045] (1) Use niobium pentoxide powder with a purity (mass fraction) of 99.99% to make a niobium pentoxide target, and add a copper back plate. The same niobium pentoxide target is used in the following examples 2 to 6 ;

[0046] (2) Soak the quartz glass sheet with the prepared cleaning solution for 15 minutes successively, and rinse the quartz glass sheet with deionized water for 1 minute; the cleaning solution is a mixed solution of concentrated sulfuric acid and hydrogen peroxide, and the ratio is 3:1; the cleaned quartz glass The substrate is placed in the magnetron sputtering reaction chamber, and the vacuum system is turned on for vacuuming until the background vacuum is 3×10 -4 Pa;

[0047] (3) Heating the substrate so that the temperature of the substrate is 20-25°C, injecting the working gas ...

Embodiment 2

[0052] This embodiment provides a method for preparing a gas-induced dimming film of fluorocarbon / palladium / magnesium-niobium pentoxide, which includes the following steps:

[0053] (1) Soak the quartz glass sheet with the prepared cleaning solution for 15 minutes successively, and rinse the quartz glass sheet with deionized water for 1 minute; the cleaning solution is a mixed solution of concentrated sulfuric acid and hydrogen peroxide, and the ratio is 3:1; the cleaned quartz glass The substrate is placed in the magnetron sputtering reaction chamber, and the vacuum system is turned on for vacuuming until the background vacuum is 3×10 -4 Pa;

[0054] (2) Heating the substrate so that the temperature of the substrate is 20-25°C, injecting the working gas A, and maintaining the pressure of 0.4-0.6Pa, after the pressure is stable, turn on the power of the palladium, magnesium and niobium pentoxide targets, and turn off each For the baffle in front of the target, pre-sputter to ...

Embodiment 3

[0059] This embodiment provides a method for preparing a gas-induced dimming film of fluorocarbon / palladium / magnesium-niobium pentoxide, which includes the following steps:

[0060] (1) Soak the quartz glass sheet with the prepared cleaning solution for 15 minutes successively, and rinse the quartz glass sheet with deionized water for 1 minute; the cleaning solution is a mixed solution of concentrated sulfuric acid and hydrogen peroxide, and the ratio is 3:1; the cleaned quartz glass The substrate is placed in the magnetron sputtering reaction chamber, and the vacuum system is turned on for vacuuming until the background vacuum is 8×10 -4 Pa;

[0061] (2) Heating the substrate so that the temperature of the substrate is 20-25°C, injecting the working gas A, and maintaining the pressure of 0.4-0.6Pa, after the pressure is stable, turn on the power of the palladium, magnesium and niobium pentoxide targets, and turn off each For the baffle in front of the target, pre-sputter to ...

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Abstract

The invention discloses fluorocarbon/palladium/magnesium-niobium pentoxide gas dimming film and a preparation method thereof. The fluorocarbon/palladium/magnesium-niobium pentoxide gas dimming film comprises a magnesium-niobium pentoxide composite film layer, a palladium catalytic layer and a fluorocarbon hydrophobic layer which are arranged sequentially on a substrate. The preparation method includes: growing the magnesium-niobium pentoxide composite film layer on the substrate, growing the palladium catalytic layer in situ on the magnesium-niobium pentoxide composite film layer, and depositing the fluorocarbon hydrophobic layer outside the fluorocarbon hydrophobic layer. Catalytic effect of palladium helps promote reversible conversion of hydrogen gas and hydrogen atoms in the hydrogen absorbing and hydrogen removal stages; niobium pentoxide is added to accelerate diffusion of hydrogen atoms in a magnesium substrate, magnesium hydroxide forms and decomposes faster, and the film can be repeatedly converted between a reflecting state and a transaprent state. The fluorocarbon film can effectively resist corrosion of inner film due to the external environment. The whole reaction process can be implemented at room temperature. The fluorocarbon/palladium/magnesium-niobium pentoxide gas dimming film has good weatherability, short response time, short recovery time and good process simplicity, and has important application prospect in the field of intelligent glass.

Description

technical field [0001] The invention belongs to the technical field of dimming films, and in particular relates to a gas-induced dimming film of fluorocarbon / palladium / magnesium-niobium pentoxide and a preparation method thereof. Background technique [0002] The dimming glass applied to smart windows can reduce the energy consumption of air conditioners by adjusting the solar radiation passing through the windows. Dimmable glass can be divided into electro-induced and gas-induced according to the reaction principle. Although electro-dimmable glass has the advantages of fast response and easy operation, it also has defects such as narrow dimming range, complex structure, high cost, and poor weather resistance. Gas-switchable glass is a new system that has emerged with the development of hydrogen energy in recent years. It reversibly switches between the corresponding transparent state and reflective state through hydrogen absorption and dehydrogenation to achieve changes in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/16C23C14/35C23C16/30C23C16/513C23C28/00
CPCC23C14/0688C23C14/165C23C14/35C23C16/30C23C16/513C23C28/322C23C28/34
Inventor 陈娟刘越彭立明邓南香吴玉娟韩靖宇阎熙丁文江
Owner SHANGHAI JIAO TONG UNIV
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