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Heating element with porous ceramic coating

A technology of porous ceramics and heating elements, which is applied in coatings, metal material coating processes, gaseous chemical plating, etc., can solve the problems of limited surface area, increase the surface roughness of heating elements, and cannot change the thermal emissivity of materials, etc. , to prolong the service life, not easy to peel off or crack, and reduce the use temperature

Active Publication Date: 2019-02-12
SUZHOU IMOTECH MATERIALS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, simply increasing the surface roughness of the heating element cannot change the thermal emissivity of the material itself.
Also, the effect of increasing the surface area by sandblasting is limited

Method used

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  • Heating element with porous ceramic coating
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preparation example Construction

[0035] The present invention also provides a method for preparing a heating element with a porous ceramic coating, preferably comprising the following steps:

[0036] A) mixing metal powder and ceramic powder to obtain a coating material; the mass fraction of the metal powder in the coating material is 0% to 50%;

[0037] B) coating the coating material on the surface of the metal substrate to obtain a semi-finished product;

[0038] C) Sintering the semi-finished product to obtain a heating element with a cermet composite coating.

[0039]In the present invention, the type and amount of the metal powder are consistent with the type and amount of the metal phase described above, and the type and amount of the ceramic powder are consistent with the type and amount of the ceramic phase described above , which will not be repeated here.

[0040] In the present invention, the metal matrix is ​​preferably processed into a size suitable for the heating cavity, and then coated.

...

Embodiment 1

[0052] Firstly, the size of the tungsten sheet or tungsten plate is processed according to the drawings to obtain a tungsten or tungsten alloy heating element substrate suitable for the MOCVD reaction chamber. Prepare tantalum carbide ceramic coating raw materials, wherein tantalum carbide powder: tungsten powder (ie metal powder) = 100:0 (weight ratio), and then use cold spray equipment to carry out cold spray on the tungsten or tungsten alloy heating element substrate, The thickness of the tantalum carbide coating is about 20 μm, and it is dried after spraying. At this time, a composite body of the tantalum carbide ceramic coating and the matrix of the tungsten or tungsten alloy heating element is obtained. The complex is sintered in a vacuum high-temperature sintering furnace, the sintering temperature is 1700°C, and the holding time is 90 minutes. According to the heating element obtained after the implementation of this embodiment, the bonding strength between the tantalu...

Embodiment 2

[0054] Firstly, the size of the tungsten sheet or tungsten plate is processed according to the drawings to obtain a tungsten or tungsten alloy heating element substrate suitable for the MOCVD reaction chamber. The ceramic phase powder for coating is TaC powder and ZrC powder, the metal binder phase is tungsten powder, and the mass ratio of the three is 50:50:10. Then use cold spraying equipment to carry out cold spraying on the tungsten or tungsten alloy heating element substrate, and the thickness of the coating is 50 μm. The complex is dried in an oven at 120°C for 30 minutes, and then sintered in a vacuum high-temperature sintering chamber at 1500°C for 90 minutes. For the heating element prepared according to this embodiment, the bonding strength between the coating and the heating element substrate is 31 MPa, and the heat radiation rate of the heating element is lower than that of Example 1, which is 0.63. The coating porosity was 23%.

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Abstract

The invention provides a heating element with a porous ceramic coating. The heating element with the porous ceramic coating comprises a metal base body and the porous ceramic coating composited on thesurface of the metal base body; the porous ceramic coating comprises a metal phase and a ceramic phase; the mass percentage of the metal phase in the porous ceramic coating is 0-50%; the metal phaseis composed of one or more of tungsten, molybdenum, tantalum, zirconium, niobium and hafnium; and the ceramic phase is one or more of carbide of rare metal, nitride of rare metal, oxide of rare metal,carbide of boron, nitride of boron, oxide of boron, aluminum oxide and magnesium oxide. The coating body in the heating element is ceramic powder, metal powder serves as an adhesion agent, and the porous ceramic coating is prepared. The coating with the ceramic material as the body can increase the heat radiation rate of the element, meanwhile, due to the fact that the ceramic coating is of a loose porous structure, the heat stress generated due to the heat expanding coefficient difference of the base body and the coating can be effectively reduced, and the coating is not prone to cracking orfalling.

Description

technical field [0001] The invention belongs to the technical field of heating elements, in particular to a heating element with a porous ceramic metal coating. Background technique [0002] In the field of high-temperature heating, such as high-temperature heating furnace, vapor deposition (CVD), and organic compound vapor deposition (MOCVD) equipment, metal tungsten and tungsten alloys with high melting point are often used as heating elements. MOCVD equipment is the key equipment for preparing light-emitting diode (LED) chips, gallium nitride (GaN) and other power semiconductor devices. In this equipment, tungsten wire or tungsten sheet is generally used as a heating element. The function of the heating element is that the heat generated by it heats the semiconductor wafer carrier on it through thermal radiation, and the carrier transfers the heat to the substrate for crystal growth. bottom to bring the substrate to the set process temperature. [0003] The process temp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C29/06C22C29/12C22C29/16C22C29/14C22C1/08C23C16/48
CPCC22C1/08C22C29/005C22C29/06C22C29/067C22C29/12C22C29/14C22C29/16C23C16/481
Inventor 都业志李玉花
Owner SUZHOU IMOTECH MATERIALS TECH CO LTD
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