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A method for rapidly preparing colored titanium oxide thin films on the surface of substrate materials

A titanium oxide film and base material technology, applied in surface reaction electrolytic coating, metal material coating process, electrolytic coating, etc., can solve the problems of poor stability, large number of large droplets, increase of large particles in the film, etc. Long service life, fast deposition rate, and small substrate temperature rise

Active Publication Date: 2020-09-29
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in these methods, the emission and storage of harmful gases in chemical vapor deposition limit its application; the laser-assisted deposition equipment is complex and costly, and is not suitable for large-scale applications; although the cost of multi-arc ion plating is low, its stability is poor, arc light The number of large droplets ejected at the moment of discharge is large, which increases the number of large particles in the film and seriously affects the quality of the film.

Method used

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  • A method for rapidly preparing colored titanium oxide thin films on the surface of substrate materials
  • A method for rapidly preparing colored titanium oxide thin films on the surface of substrate materials
  • A method for rapidly preparing colored titanium oxide thin films on the surface of substrate materials

Examples

Experimental program
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Effect test

Embodiment 1

[0035] A method for rapidly preparing a colored titanium oxide film on the surface of a base material, comprising the following steps:

[0036] A. Use magnetron sputtering titanium coating on the surface of the substrate material, so that the surface of the substrate material is covered with titanium film, magnetron sputtering titanium coating parameters: sputtering power is 150W, sputtering pressure is 0.8Pa, argon gas is 60sccm, anti The rotation time is 1 μs, the inversion frequency is 50 Hz, the sputtering target voltage is 314 V, the sputtering target current is 0.48 A, and the sputtering rate of the titanium target is 13.3 nm / min. in the electrolytic cell;

[0037] B, add electrolytic solution in the electrolyzer in step A, electrolytic solution comprises the sodium gluconate of 100g / L, the ammonium fluoride of 0.3g / L, the cerium sulfate tetrahydrate of 1.3g / L, the 30% of 50mL / L concentration of hydrogen peroxide and 100mL / L of 30% concentration of phosphoric acid;

[...

Embodiment 2

[0043] The difference from Example 1 is that the oxidation power supply uses a direct current of 20V, and the color of the titanium oxide film on the surface of the substrate material is dark purple.

Embodiment 3

[0045] The difference from Example 1 is that the oxidation power supply uses a direct current of 30V, and the color of the titanium oxide film on the surface of the substrate material is blue.

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Abstract

The invention relates to the technical field of film coating, in particular to a method for rapidly preparing a colorful titanium oxide thin film on the surface of substrate material. The method comprises the following steps: at first, a layer of titanium film is sprayed on the surface of the substrate material through the magnetron sputtering technology, then, the substrate material is put into an electrolytic cell which has been set up, the electrolytic cell is filled with electrolyte, the to-be-coated substrate material is put on the cathode, and a stainless steel plate is hung on the anode. Generation and color of the titanium oxide thin film are controlled through changing the voltage of the electrolytic cell, so that the titanium film on the surface of the substrate material generates oxidizing reaction to generate a layer of colorful titanium oxide thin film to protect the titanium film. The electrolyte can be recycled and meets the requirements of environmental protection and industrial production; and in addition, the generated titanium oxide thin film can alleviate abrasion, scratch and contact corrosion of titanium, so that the problems about maintenance and abrasion during the using process of titanium are solved. With adoption of the method, the titanium oxide thin film can be rapidly prepared on the surface of common substrate material, and in addition, the colorof the titanium oxide thin film is easy to control and uniform. The thickness of the titanium oxide thin film prepared through the method is slightly influenced by the material shape.

Description

technical field [0001] The invention relates to the technical field of coating, in particular to a method for quickly preparing a colored titanium oxide film on the surface of a base material. Background technique [0002] Titanium has been widely used in the aviation and aerospace industry because of its high specific strength and good corrosion resistance. However, its full utilization is limited by its tendency to be prone to wear, abrasion and contact corrosion. In order to prevent and reduce the wear, abrasion and contact corrosion of titanium, anodic oxidation can be performed on the surface of titanium and its alloys to form an oxide layer on the surface. [0003] The color of titanium oxide film is colorless and transparent. Titanium metal is oxidized as the anode loses electrons in the electrolytic cell. In the initial stage of oxidation, a dense oxidation barrier layer will be formed on the surface of the titanium film, and the fluorine ions in the electrolyte and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/14C25D11/26
CPCC23C14/14C23C14/35C25D11/26
Inventor 孙珲扎玛托福宋淑梅王昆仑唐宁吕英波杨田林
Owner SHANDONG UNIV
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