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Medium-high temperature oxidation resistant Ti/TiN multilayer coating and preparation method

A multi-layer coating, medium and high temperature technology, applied in coating, metal material coating process, ion implantation plating and other directions, can solve problems such as cracking and peeling, achieve low preparation cost, improve bonding strength, internal stress buffering Effect

Active Publication Date: 2019-09-20
HENAN INST OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] Aiming at problems such as cracking and peeling due to excessive internal stress and brittleness of nitride coatings that are too thick, the purpose of the present invention is to provide a Ti / TiN multilayer coating that is resistant to medium and high temperature oxidation and its preparation method. The coating has good bonding strength with the substrate, compact structure, and good resistance to medium and high temperature oxidation

Method used

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  • Medium-high temperature oxidation resistant Ti/TiN multilayer coating and preparation method
  • Medium-high temperature oxidation resistant Ti/TiN multilayer coating and preparation method
  • Medium-high temperature oxidation resistant Ti/TiN multilayer coating and preparation method

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Embodiment 1

[0049] In this embodiment, the preparation method of the Ti / TiN multilayer coating resistant to medium and high temperature oxidation comprises the following steps:

[0050] (1) Pretreatment

[0051] TC4 titanium alloy is selected, the sample size is 10mm×10mm×2mm, the surface is polished to remove surface oil and rust, and then placed in acetone and ethanol solutions in turn, and ultrasonic cleaning is performed for 5 minutes each to further remove oil and other attachments on the surface of the substrate. After fully drying with a hair dryer, quickly hang it on the sample rack, put it into the studio and vacuumize it to 6.0×10 -3 Pa.

[0052] (2) Ion cleaning

[0053] The argon gas was introduced, the pressure was controlled at 0.2 Pa, the negative bias value of 800V was applied to the substrate, the duty ratio was 20%, and the ion bombardment cleaning time was 10 minutes.

[0054] (3) Deposition of sub-layers

[0055] After ion cleaning, cut off the argon gas, feed in n...

Embodiment 2

[0058] In this embodiment, the preparation method of the Ti / TiN multilayer coating resistant to medium and high temperature oxidation comprises the following steps:

[0059] (1) Pretreatment

[0060] TC4 titanium alloy is selected, the sample size is 10mm×15mm×2mm, the surface is polished to remove surface oil and rust, and then placed in acetone and ethanol solutions in turn, and ultrasonic cleaning is performed for 7 minutes each to further remove oil and other attachments on the surface of the substrate. After fully drying with a hair dryer, quickly hang it on the sample rack, put it into the working room and evacuate it to 6.5×10 -3 Pa.

[0061] (2) Ion cleaning

[0062] The argon gas was introduced, the pressure was controlled at 0.25 Pa, the negative bias value of 850 V was applied to the substrate, the duty ratio was 25%, and the ion bombardment cleaning time was 13 minutes.

[0063] (3) Deposition of sub-layers

[0064] After ion cleaning, cut off the argon gas, fe...

Embodiment 3

[0067] In this embodiment, the preparation method of the Ti / TiN multilayer coating resistant to medium and high temperature oxidation comprises the following steps:

[0068] (1) Pretreatment

[0069] TA11 titanium alloy is selected, the sample size is 15mm×15mm×1mm, the surface is polished to remove surface oil and rust, and then placed in acetone and ethanol solutions in turn, and ultrasonic cleaning is performed for 10 minutes each to further remove oil and other attachments on the surface of the substrate. After fully drying with a hair dryer, quickly hang it on the sample rack, put it into the studio and vacuumize it to 7.0×10 -3 Pa.

[0070] (2) Ion cleaning

[0071] Argon gas was introduced, the pressure was controlled at 0.3 Pa, a negative bias voltage of 900V was applied to the substrate, the duty cycle was 20%, and the ion bombardment cleaning time was 15 minutes.

[0072] (3) Deposition of sub-layers

[0073] After ion cleaning, cut off the argon gas, feed in nit...

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Abstract

The invention relates to the field of metal material surface high temperature protective coatings, in particular to a medium-high temperature oxidation resistant Ti / TiN multilayer coating and a preparation method. The Ti / TiN multilayer coating is formed in the mode that Ti sublayers and TiN sublayers are deposited on a titanium alloy substrate sequentially alternately, the first layer and the last layer are both TiN layers, the thickness of each Ti sublayer is 0.05-1.0 [mu]m, the thickness of each TiN sublayer is 1.8-2.2 [mu]m, and the total layer number is an odd number between 9 and 21. Preparation steps of the Ti / TiN multilayer coating comprise pretreatment, ion cleaning and sublayer deposition. According to the medium-high temperature oxidation resistant Ti / TiN multilayer coating and the preparation method, the problems that a nitride coating is too thick, and cracking, peeling and the like are liable to appear due to too high internal stress and brittleness can be solved, bonding strength of the coating and the substrate is good, and the Ti / TiN multilayer coating is compact in structure, has good medium-high temperature oxidation resistance, and can provide a selection scheme for high temperature protection of military aircraft parts.

Description

[0001] Technical field: [0002] The invention relates to the field of high-temperature protective coatings on the surface of metal materials, in particular to a Ti / TiN multilayer coating resistant to medium-high temperature oxidation and a preparation method thereof. [0003] Background technique: [0004] Due to its light weight, high specific strength and elastic modulus and other mechanical properties, titanium alloys have been used to make aircraft components. For example, the proportion of titanium alloy in the fuselage material of military aviation aircraft reaches more than 50%. The friction between the skin surface of the aircraft and the air generates heat and oxidizes the service life of the titanium alloy. In addition, the current service temperature of the final stage blade of the aero-engine compressor has exceeded 500°C, which is higher than the service temperature of the traditional titanium alloy, which limits the service life of the titanium alloy. applicatio...

Claims

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Application Information

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IPC IPC(8): C23C14/02C23C14/16C23C14/06C23C14/32
CPCC23C14/0021C23C14/021C23C14/022C23C14/025C23C14/0641C23C14/16C23C14/32
Inventor 张明明李勇峰赵红远吴婷婷张亚奇冯宜鹏谢文龙王雅慧苏建修
Owner HENAN INST OF SCI & TECH
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