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Preparation method of composite coating on inner wall of reduction furnace bell jar

A composite coating, furnace clock technology, applied in the coating, superimposed layer plating, metal material coating process and other directions, can solve the problems of splicing plate welding seam and other problems, to prevent pollution, reduce costs, not easy to bulge and fall off Effect

Inactive Publication Date: 2019-11-08
江苏广研新材料技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a preparation method of the composite coating on the inner wall of the bell jar of the reduction furnace. Structural stability of the layer, prolonging the service life of the coating

Method used

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  • Preparation method of composite coating on inner wall of reduction furnace bell jar
  • Preparation method of composite coating on inner wall of reduction furnace bell jar
  • Preparation method of composite coating on inner wall of reduction furnace bell jar

Examples

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Effect test

Embodiment 1

[0032] A method for preparing a composite coating on the inner wall of a reduction furnace bell, comprising the following steps:

[0033] (1) Surface treatment: the inner wall of the reduction furnace bell jar is polished with 800# sandpaper, followed by acetone cleaning and compressed air drying of the inner wall of the reduction furnace bell jar to remove impurities such as grease on the inner wall of the bell jar;

[0034] (2) The inner diameter of the bell jar of the reduction furnace is 1.8m, and the matching protective fixture and spraying auxiliary equipment are installed to ensure that the bell jar of the reduction furnace is not damaged and polluted during the coating preparation process;

[0035] (3) Adopt supersonic flame spraying to prepare one deck transition layer on the stainless steel bell jar inner wall that has done surface treatment; Transition layer thickness is 100 μ m, porosity is less than 0.5%, bonding strength>50MPa; The raw material of described transi...

Embodiment 2

[0040] A method for preparing a composite coating on the inner wall of a reduction furnace bell, comprising the following steps:

[0041] (1) Surface treatment: the inner wall of the reduction furnace bell jar is polished with 800# sandpaper, followed by acetone cleaning and compressed air drying of the inner wall of the reduction furnace bell jar to remove impurities such as grease on the inner wall of the bell jar;

[0042] (2) The inner diameter of the reduction furnace bell is 1.8m, and the supporting protective fixture and spraying auxiliary equipment are installed to ensure that the reduction furnace bell will not be damaged and polluted during the coating preparation process; A transition layer is prepared on the inner wall of the treated stainless steel bell jar; the thickness of the transition layer is 50 μm, the porosity is less than 0.5%, and the bonding strength is > 50 MPa; the raw materials of the transition layer are aluminum, iron, copper, nickel, chromium, zinc...

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Abstract

The invention discloses a preparation method of composite coating on the inner wall of a reduction furnace bell jar. The preparation method comprises the following steps that a transition layer is prepared, and specially, a transition layer is prepared on the inner wall of the stainless steel bell jar by adopting thermal spraying; raw materials of the transition layer are an alloy consisting of one or more of aluminum, iron, copper, nickel, chromium, zinc, vanadium, manganese, silicon, cobalt, silver, cadmium, zirconium and tungsten; an anti-fouling coating with high density, high bonding strength, high thermal stability and low defect rate are prepared by using gas power spraying on the surface of the transition layer; and the raw materials of the anti-fouling coating are an alloy consisting of one or more of silver, gold and platinum. According to the preparation method, on one hand, the process steps can be simplified, the production cost can be reduced, the problem of the defect ofweld joints of a spliced plate can be solved, on the other hand, the structural stability of the coating can be improved, and the service life of the coating can be prolonged.

Description

technical field [0001] The invention belongs to the technical field of polysilicon production equipment, and in particular relates to a method for preparing a composite coating on the inner wall of a bell jar of a reduction furnace. Background technique [0002] Polysilicon is an electronic material that is purified by a series of physical and chemical reactions to achieve a certain purity. It is the main raw material for manufacturing silicon polished wafers, solar cells and high-purity silicon products. It is also the most basic for the information industry and new energy industry. raw materials. The modified Siemens method is currently the most mature, widely used, and fastest-expanding polysilicon production technology. Most manufacturers in the world use the modified Siemens method to produce polysilicon. High-purity hydrogen reduces silicon-containing gas (commonly used silicon-containing gas is high-purity trichlorosilane and silane) to generate polysilicon, which is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/02C23C24/04C23C4/06C23C4/08C23C4/129C23C4/131C23C4/134
CPCC23C4/06C23C4/08C23C24/04C23C28/021C23C28/023C23C4/129C23C4/131C23C4/134
Inventor 张科杰谢迎春黄健黄仁忠王帅王高民曾良吴晓涛
Owner 江苏广研新材料技术有限公司
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