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Barium titanate-strontium titanate nano composite film material and preparation method thereof

A nano-composite and thin-film material technology, applied in metal material coating process, ion implantation plating, superposition layer plating, etc., can solve the problems of no ferroelectric properties, large leakage current, and reduced insulation, and achieve The effect of good electrical performance, simple process and broad application prospects

Active Publication Date: 2019-12-24
SHENYANG POLYTECHNIC UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In general, adding a second phase with metal conductivity to ferroelectric materials, such as strontium ruthenate, will generate a relatively large leakage current due to the decrease in the insulation of ferroelectric materials, so it does not have good ferroelectric properties.

Method used

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  • Barium titanate-strontium titanate nano composite film material and preparation method thereof
  • Barium titanate-strontium titanate nano composite film material and preparation method thereof
  • Barium titanate-strontium titanate nano composite film material and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0032] Contains 2vol% SrRuO 3 Barium titanate-strontium ruthenate nanocomposite film

[0033] (1) Nb:SrTiO 3 (001) The substrate is ultrasonically cleaned in acetone and alcohol for 20 minutes, then heated to 750° C. in vacuum, and annealed for 30 minutes;

[0034] (2) Using the pulsed laser deposition method at a temperature of 750°C and an oxygen pressure of 15Pa, on Nb:SrTiO 3 (001) Deposit strontium ruthenate for 2 seconds on the substrate, then deposit barium titanate for 24 seconds;

[0035] (3) The above process was repeated 40 times to prepare a barium titanate-strontium ruthenate nanocomposite film material with a thickness of 380 nm. The material has a crystal orientation of (001) plane, where, SrRuO 3 The volume ratio of the nanocomposite film is 2vol%, and the particles of nanometer size are uniformly distributed on the barium titanate substrate (see image 3 ). The remanent polarization of the film material is 14.1μC / cm 2 , the saturation polarization is 27...

Embodiment 2

[0037] Contains 4vol% SrRuO 3Barium titanate-strontium ruthenate nanocomposite film

[0038] (1) Using Nb:SrTiO 3 (001) Substrate. Microwave ultrasonically the substrate in acetone and alcohol for 20 minutes, then heat the substrate to 750°C in vacuum and keep it warm for 30 minutes;

[0039] (2) Using the pulsed laser deposition method at a temperature of 750°C and an oxygen pressure of 15Pa, on Nb:SrTiO 3 (001) Deposit strontium ruthenate for 4 seconds on the substrate, then deposit barium titanate for 23 seconds;

[0040] (3) The above process was repeated 40 times to prepare a barium titanate-strontium ruthenate nanocomposite film material with a thickness of 380 nm. The material has a crystal orientation of the (001) plane (see figure 1 ), among them, SrRuO 3 The volume ratio of the nanocomposite film is 4vol%, and the particles of nanometer size are uniformly distributed on the barium titanate substrate (see image 3 ). The remanent polarization of the film mater...

Embodiment 3

[0042] Contains 9vol% SrRuO 3 Barium titanate-strontium ruthenate nanocomposite film

[0043] (1) Using Nb:SrTiO 3 (001) Substrate. Microwave ultrasonically the substrate in acetone and alcohol for 20 minutes, then heat the substrate to 750°C in vacuum and keep it warm for 30 minutes;

[0044] (2) Using the pulsed laser deposition method at a temperature of 750°C and an oxygen pressure of 15Pa, on Nb:SrTiO 3 (001) Deposit strontium ruthenate for 9 seconds on the substrate, then deposit barium titanate for 22 seconds;

[0045] (3) The above process was repeated 40 times to prepare a barium titanate-strontium ruthenate nanocomposite film material with a thickness of 380 nm. The material has a crystal orientation of the (001) plane (see figure 1 ), among them, SrRuO 3 The volume ratio of the nanocomposite film is 9vol%, and its nanoparticles are evenly distributed on the barium titanate matrix (see figure 2 ). The remanent polarization of the film material is 40.3μC / cm ...

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Abstract

The invention provides a barium titanate-strontium titanate nano composite film material and a preparation method thereof. The material comprises the components of, in volume ratio, 2%-9% of SrRuO3, 91%-98% of BaTiO3, and the material microstructure is characterized in that SrRuO3 nano particles are uniformly distributed on a BaTiO3 matrix. The barium titanate-strontium titanate nano composite film material has the advantages that the dielectric constant increases by 10%-24% compared with a pure barium titanate film; the material has good ferroelectric polarization performance, the remanent polarization intensity of the material reaches 40.3 microcoulomb / cm<2>, saturated polarization strength reaches 47. 8 microcoulomb / cm<2>, and compared with the barium titanate film, the remanent polarization intensity increases by 950%, and the saturated polarization intensity increase by 140%; and as a lead-free ferroelectric material, a composite film has a wide application prospect in integratedferroelectric devices such as a ferroelectric random access memory, a film capacitor, a sensor, an actuator.

Description

technical field [0001] The invention belongs to the fields of electronic information materials, functional materials and intelligent materials, and specifically relates to a barium titanate-strontium ruthenate nanocomposite film material and a preparation method thereof. Background technique [0002] Ferroelectric thin films have excellent electrical properties such as ferroelectricity, piezoelectricity, dielectricity and optoelectronics, and are widely used in integrated ferroelectric devices such as data storage, crystal field effect transistors, surface acoustic wave devices, sensors and actuators. At present, the commonly used ferroelectric material is lead zirconate titanate (Pb(Zr x Ti 1-x )O 3 , referred to as PZT) is a representative lead-based oxide ceramic material, in which the PbO content accounts for about 70% of the total raw materials. There is a risk of serious pollution to the ecological environment during the production, use and disposal of lead-based fe...

Claims

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Application Information

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IPC IPC(8): C23C14/08C23C14/28
CPCC23C14/08C23C14/088C23C14/28C23C28/04
Inventor 王占杰
Owner SHENYANG POLYTECHNIC UNIV
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