Ceramic support body for microwave magnetron and preparation method thereof
A technology of support and ceramic matrix, which is applied in the direction of electric solid device, semiconductor device, semiconductor/solid state device components, etc., can solve the problem of easy oxidation of aluminum nitride ceramics, and achieve the improvement of ceramic properties, density and mechanical properties. , the effect of reducing the cost of raw materials and energy consumption
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Embodiment 1
[0037] Embodiment 1: The ceramic support body for microwave magnetron comprises a ceramic substrate and a metallized layer, wherein the ceramic substrate and its preparation method
[0038] The raw material formula components of the ceramic matrix in the ceramic support body in parts by weight: 75 parts of silicon carbide-triazole silane-aluminum nitride mesh matrix, 20 parts of blast furnace slag, 3 parts of dispersant and 2 parts of defoaming agent. Wherein, the dispersant is sodium hexametaphosphate, and the defoaming agent is alkyl silicone oil.
[0039] According to the preparation method of the ceramic matrix of above-mentioned formula composition, comprise the following steps:
[0040] A1. Preparation of silicon carbide-triazole silane-aluminum nitride mesh film substrate:
[0041] The aluminum nitride ceramic powder is placed in a 5% oxygen atmosphere, and oxidized at 1000 ° C for 30 minutes to obtain an aluminum oxide film on the surface of the aluminum nitride ceram...
Embodiment 2
[0049] Embodiment 2: The ceramic support body for microwave magnetron comprises a ceramic substrate and a metallized layer, wherein the ceramic substrate and its preparation method
[0050] The raw material formula components of the ceramic matrix in the ceramic support body in parts by weight: 77 parts of silicon carbide-triazole silane-aluminum nitride mesh matrix, 15 parts of blast furnace slag, 5 parts of sodium hexametaphosphate and 3 parts of alkyl silicone oil.
[0051] The preparation method of the ceramic matrix in Example 2 is the same as in Example 1, and the specific steps refer to Example 1. It is worth noting that in the A1 step, 1-phenyl-3-hydroxyl-1,2,4-triazole, The mass ratio of sodium ethoxide solution and 3-chloropropyltrimethoxysilane is 1:1:2, the mass ratio of silicon carbide powder and triazole silane compound is 1:2, the surface modified silicon carbide and oxidized nitrogen The mass ratio of aluminum oxide is 1:7.
Embodiment 3
[0052] Embodiment 3: The ceramic support body for microwave magnetron comprises a ceramic substrate and a metallized layer, wherein the ceramic substrate and its preparation method
[0053] The raw material formula components of the ceramic matrix in the ceramic support body in parts by weight: 83 parts of silicon carbide-triazole silane-aluminum nitride mesh matrix, 12 parts of blast furnace slag, 4 parts of sodium hexametaphosphate and 1 part of alkyl silicone oil.
[0054] The preparation method of the ceramic matrix in Example 3 is the same as in Example 1, and the specific steps refer to Example 1. It is worth noting that in the A1 step, 1-phenyl-3-hydroxyl-1,2,4-triazole, The mass ratio of sodium ethoxide solution and 3-chloropropyltrimethoxysilane is 1:2:1, the mass ratio of silicon carbide powder and triazole silane compound is 1:3, the surface modified silicon carbide and oxidized nitrogen The mass ratio of aluminum oxide is 1:8.
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